Made in Japan
Manufacturer: Chiyoda Seiki
Model: EX-20-TD

Feature

Valve and diaphragm integrated type (tie diaphragm) is adopted.
Gas contacting parts are made of SUS316 with special corrosion resistant surface treatment.
Super-secret structure with He leakage (external leakage) of 1×10-9Pa-m3/sec or less.
Prevents gas leakage from external blowout in the event of diaphragm breakage.

Specifications