NISSAN TANAKA S-TORR V A10 Pressure Regulator For Semiconductors

Manufacturer: Nissan Tanaka
Model: S-TORR V A10

Negative pressure control, models for low vapor pressure: S-TORRⅤA10

Features

Developers based the S-TORR regulator on the highly trusted TORR regulator used in semiconductor process gas lines to create a high-purity gas pressure regulator.
Eliminating the screw structure in the gas contact part and applying standard electropolishing achieve very high moisture displacement characteristics and particle reduction.
Welders connect the body and fittings, and the external seal of the diaphragm section adopts a metal seal structure. Its high external sealability ensures safe use, especially with high-purity gases.
A filter incorporated in the flow path of the primary chamber reduces internal leak occurrence.
The inspection team includes helium leak testing in the full-number shipping inspection.
The STⅤA10 series supports negative pressure control and can be used in cylinder cabinets to supply low vapor pressure liquefied gases under negative pressure.
Designers have designed the gas contact part without a spring to reduce the risk of particle generation.
The regulator employs a tied diaphragm type.
For corrosive gases, we offer the SH series, which uses a Ni-Cr-Mo alloy for the main metal parts in contact with the gas, offering high corrosion resistance.

Basic Specifications

Use materials
Gas connection part
Main body: SUS316L
Diaphragm: SUS316L / Ni-Cr-Mo alloy （STⅤA10SH）
Filter: SUS316L / Ni-Cr-Mo alloy （STⅤA10SH）
Pressure Gauge: SUS316L
Joint or fitting: SUS316L
Other gas contact parts: SUS316L, SUS316, Fluororesin/ Ni-Cr-Mo alloy, SUS316L, Fluororesin （STⅤA10SH）
Non-contact gas part
Cap: C3604
Pressure regulating handle: ABS plastic, C3604

Performance
Inlet side maximum working pressure: 1.0MPa
Outlet side maximum working pressure: 0.2MPa
Maximum flow rate: 6.5L/min(nor)（P1=0.1MPa, P2=0.025MPa, N₂ GAS）
Operating temperature: -5～40℃
Weight: 1.8kg (2 ports), 2.0kg (3 ports)
Built-in filter filtration degree: 20μm / 10μm（STⅤA10SH）
Surface roughness of connected gas metal parts: Ra0.25μm (optional： Ra0.1μm）
Diameter of inlet and outlet ports: 1/4″
External leak amount: 1.3×10^-11Pa・m3/sec below

Flow Characteristics Diagram

Appearance

Description

Designated Attention

※1 If you choose the 4-port specification, please select the symbol for the primary-side pressure gauge from the options below and replace it with the product name assembly “30X”

Primary Side Pressure Gauge Symbol (Maximum Operating Pressure)	03G：-0.1～0.3MPa（0.2MPa)	15G：-0.1～1.5MPa（１.0MPa)
	06G：-0.1～0.6MPa（0.4MPa)	15F： Instrumentation without a pressure gauge, with a port and a fitting cap (1.0MPa)
	10G：-0.1～1.0MPa（0.6MPa)	15B： Instrumentation without a pressure gauge, with a port and a fitting plug (1.0MPa)

※2 In the case of 2 ports, please select “X.” “X” refers to a product without a pressure gauge (unprocessed port). If you have only fittings without a pressure gauge and want to protect the fitting with a resin cap, select “F.” If you want to secure it with a metal plug, select “B.”
※3 In the case of other types of joints, different symbols are used.
※4 In the case of other shapes, different symbols will be used.
※5 We have selected the optimal resin for each type of gas used in the gas connection part (nozzle).
※6 This is an example of additional specifications. In the case of specifying interfacial dimensions or other special requirements, different symbols or numbers will be used. Please inquire for more details.