Manufacturer: Nissan Tanaka
Model: S-TORR V 1900

Diborane-specific two-stage reduced pressure type model: S-TORR V 1900

Features

• We developed the S-TORR regulator as a high-purity gas pressure regulator based on the TORR regulator, which has earned tremendous trust in semiconductor process gas lines.
• We eliminate the screw structure in the gas contact part and standardly apply electrolytic polishing to achieve very high moisture displacement characteristics and particle reduction.
• We connect the body and fittings by welding and use a metal seal structure for the external seal of the diaphragm part. This high external sealing allows safe use even with particularly high purity gases.
• We perform helium leak tests on all outgoing inspections.
• In the STⅤ1900 series, we minimize internal leaks to make it the most… [the sentence cuts off here].

Basic Specifications

Use materials
Gas connection part
Main body: SUS316L
Diaphragm: SUS316L
Filter: SUS316L
Pressure Gauge: SUS316L
Joint or fitting: SUS316L
Other gas contact parts: SUS316L, SUS316, Fluororesin
Non-contact gas part
Cap: C3604
Pressure regulating handle: ABS plastic, C3604

Performance
Inlet side maximum working pressure: 15MPa
Outlet side maximum working pressure: 0.6MPa
Maximum flow rate: 30L/min(nor)（P1=10MPa, P2=0.6MPa, N₂ GAS）
Operating temperature: -5～40℃
Weight: 1.2kg (2 ports), 1.6kg (3 ports)
Built-in filter filtration degree: 20μm
Surface roughness of connected gas metal parts: Ra0.25μm (optional： Ra0.1μm）
Diameter of inlet and outlet ports: 1/4″
External leak amount: 1.3×10^-11Pa・m3/sec below

Flow Characteristics Diagram

Appearance

Description

Designated Attention

※1 In case there is no secondary pressure gauge, the symbols for each usage pressure are as follows.

※2 In the case of 2 ports, please select “X.” “X” indicates a product without a pressure gauge (unprocessed port). If you have only fittings without a pressure gauge and want to protect the fitting with a plastic cap, select “F.” If you want to secure it with a metal plug, select “B.”
※3 In the case of other types of fittings, different symbols will be used.
※4 In the case of other shapes, different symbols will be used.
※5 We have selected the optimal resin for the gas connection part (nozzle) for each type of gas used.
※6 This is an example of additional specifications. In the case of other special requirements, such as specifying dimensional clearances, different symbols or numerical values will be used. For more details, please inquire.

⚠️Warning: For correct usage, please make sure to read the ‘Instruction Manual’ carefully before use.

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