NISSAN TANAKA TORR-80 Pressure Regulator For Semiconductors

Manufacturer: Nissan Tanaka
Model: TORR-80

Low-pressure, standard model for the primary side low-pressure use: TORR-30

Features

  • The TORR series, synonymous with “semiconductor gas pressure regulators” due to its long track record, has earned high reliability.
  • Technicians perform assembly in a Class 1000 cleanroom to a 0.3μm standard.
  • A built-in filter in the primary chamber’s flow path reduces internal leaks.
  • We conduct a helium leak test on every unit as part of our comprehensive shipping inspection.
  • We can also produce specifications for electrolytic polishing (contact gas metal part surface roughness Ra0.25μm).
  • You can use the TORR-80 series as a medium flow model for primary low-pressure applications, suitable for primary pressure reduction of liquefied gases or in piping that requires flow rate control.

Basic Specifications

Use materials
Gas connection part
Main body: SUS316L
Diaphragm: SUS316L
Filter: SUS316L (Welding connections do not include a filter.)
Pressure Gauge: SUS316L
Joint or fitting: SUS316 (Threaded connection), SUS316L (Welding connection)
Other gas contact parts: SUS316L, SUS316, Fluororesin
Non-contact gas part
Cap: C3604
Pressure regulating handle: ABS plastic, C3604

Performance
Inlet side maximum working pressure: 2.0MPa
Outlet side maximum working pressure: 0.6MPa
Maximum flow rate: 1,600L/min(nor)(P1=1.5MPa, P2=0.6MPa, N₂ GAS)
Operating temperature: -5~40℃
Weight: 3.0kg
Built-in filter filtration degree: 20μm (The welding connection specification does not include a filter.)
Diameter of inlet and outlet ports: 1/2″
External leak amount: 1.3×10-8Pa・m3/sec below

Flow Characteristics Diagram

Appearance

Description

Designated Attention

※1 If a 4-port specification is selected, please choose the symbol for the primary side pressure gauge from below and replace it with the number 30 in the product name assembly.

Primary side pressure gauge symbol Maximum operating pressure
03 -0.1~0.3MPa(0.2MPa)
06 -0.1~0.6MPa(0.4MPa)
10 -0.1~1.0MPa(0.6MPa)
15 -0.1~1.5MPa(1.0MPa)
30 -0.1~3.0MPa(2.0MPa)

※2 If there is no secondary pressure gauge, the symbols for each operating pressure are as follows:

Operating Pressure Symbol
~0.2MPa 03
~0.4MPa 06
~0.6MPa 10

※3 In the case of other shapes, different symbols are used.
※4 When using slant connectors, the structure is basically a welded connection for structure ②. For other types of connectors, structure ② is essentially a threaded connection.
※5 Only joint types S (SwageLock) and F (FineLock) are available for selection.

⚠️Warning: For correct usage, please make sure to read the ‘Instruction Manual’ carefully before use.


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