Specifications

*1: Steam must be from the same liquid as service liquid.
*2: The water ejector is for non-condensable gases.

Features

• Oil diffusion pumps attain high vacuum, and are used as the exhaust system for a wide variety of vacuum processes such as vacuum heat treatment, vacuum evaporation, electric beam welding, and sputtering.
• The lineup includes pumps with an volume flow rate of 10,000L/s or higher (without baffles).
• This is a highly reliable high vacuum pump with little pressure fluctuation even with bumping the pumping fluid.
• It uses no mechanical moving parts, resulting to be robust and long lifetime.
• Easy to disassemble design simplifies internal cleaning and inspection work.

Specifications

*1 : Model numbers with a “B” at the end are energy-saving, space-saving models.
*2 : Maximum cooling water temperature should be 25℃.
*3 : The auxiliary vacuum pump must be selected according to the size of the target exhaust system and other specifications.
(For details, contact our sales representative)

Standard accessories

• Hydraulic oil (Lion A) — for 1 unit
• Gaskets for intake and exhaust (nitryl rubber) — 1 set
• Oil level gauge (DP10 or higher) — 1 set
• Oil supply and drain port (DP10 or higher) — 1 set
• Bimetal (DP8 to DP22B) — 1 set
• Thermostat (DP18B or higher) — 1 set

Features

• Ideal for exhausting water vapor, water droplets, and organic solvents.
• Good also for exhausting gases with dust and particles.
• It can also exhaust flammable corrosive gases.
• Simple construction, economical design.
• Material and seal type can also be changed.
• A variety of sealing liquids can be used.
• Effective as the final stage in compound exhaust systems.
• Can achieve base pressure below the steam pressure of the liquid ring by attached the air ejector.
• A 2-stage air ejector offers even better pressure.

Specifications

*1 : WA is equipped with a single-stage air-ejector.
*2 : WB is equipped with a 2-stage air-ejector.
*3 : For a water temperature of 15℃.
*4 : Maximum refilling water temperature should be 35℃.
*5 : Non-standard motors are also available.
-Allowable ambient temperature: 10 to 40℃ during operation, -5 to +60℃ in storage.
-Drain water before storing to prevent freezing over.

Dimensions

Features

• Ideal for exhausting water vapor, water droplets, and organic solvents.
• Good also for exhausting gases with dust and particles.
• It can also exhaust flammable corrosive gases.
• Simple construction, economical design.
• Material and seal type can also be changed.
• A variety of sealing liquids can be used.
• Effective as the final stage in compound exhaust systems.
• Can achieve base pressure below the steam pressure of the liquid ring by attached the air ejector.
• A 2-stage air ejector offers even better pressure.

Specifications

*1 : WA is equipped with a single-stage air-ejector.
*2 : WB is equipped with a 2-stage air-ejector.
*3 : For a water temperature of 15℃.
*4 : Maximum refilling water temperature should be 35℃.
*5 : Non-standard motors are also available.
-Allowable ambient temperature: 10 to 40℃ during operation, -5 to +60℃ in storage.
-Drain water before storing to prevent freezing over.

Dimensions

Features

• Ideal for exhausting water vapor, water droplets, and organic solvents.
• Good also for exhausting gases with dust and particles.
• It can also exhaust flammable corrosive gases.
• Simple construction, economical design.
• Material and seal type can also be changed.
• A variety of sealing liquids can be used.
• Effective as the final stage in compound exhaust systems.
• Can achieve base pressure below the steam pressure of the liquid ring by attached the air ejector.

Specifications

*1 : WA is equipped with a single-stage air-ejector.
*2 : For a water temperature of 15℃.
*3 : Maximum refilling water temperature should be 35℃.
*4 : Non-standard motors are also available.
-Allowable ambient temperature: 10 to 40℃ during operation, -5 to +60℃ in storage.
-Drain water before storing to prevent freezing over.

Dimensions

Features

• Ideal for exhausting water vapor, water droplets, and organic solvents.
• Good also for exhausting gases with dust and particles.
• It can also exhaust flammable corrosive gases.
• Simple construction, economical design.
• Material and seal type can also be changed.
• A variety of sealing liquids can be used.
• Effective as the final stage in compound exhaust systems.
• Can achieve base pressure below the steam pressure of the liquid ring by attached the air ejector.

Specifications

• *1 : WA is equipped with a single-stage air-ejector.
  *2 : For a water temperature of 15℃.
  *3 : Maximum refilling water temperature should be 35℃.
  *4 : Non-standard motors are also available.
  -Allowable ambient temperature: 10 to 40℃ during operation, -5 to +60℃ in storage.
  -Drain water before storing to prevent freezing over.

Dimensions

Features

• Ideal for exhausting water vapor, water droplets, and organic solvents.
• Good also for exhausting gases with dust and particles.
• It can also exhaust flammable corrosive gases.
• Simple construction, economical design.
• Material and seal type can also be changed.
• A variety of sealing liquids can be used.
• Effective as the final stage in compound exhaust systems.
• Can achieve base pressure below the steam pressure of the liquid ring by attached the air ejector.

Specifications

• *1: WA is equipped with a single-stage air-ejector.
  *2: For a water temperature of 15℃.
  *3: Maximum refilling water temperature should be 35℃.
  *4: Non-standard motors are also available.
  -Allowable ambient temperature: 10 to 40℃ during operation, -5 to +60℃ in storage.
  -Drain water before storing to prevent freezing over

Dimensions

Features

• Ideal for exhausting water vapor, water droplets, and organic solvents.
• Good also for exhausting gases with dust and particles.
• It can also exhaust flammable corrosive gases.
• Simple construction, economical design.
• Material and seal type can also be changed.
• A variety of sealing liquids can be used.
• Effective as the final stage in compound exhaust systems.

Specifications

• For a water temperature of 15℃.
• Maximum refilling water temperature should be 35℃.
• Non-standard motors are also available.
• Allowable ambient temperature: 10 to 40℃ during operation, -5 to +60℃ in storage.
• Drain water before storing to prevent freezing over.

Dimensions

Features

• Stable and continuous operation at high pressures (low vacuum zones)
• Withstanding operation characterized by severe repetition
• Robust exhaust valve
• Sight glass for observing oil circulation
• Oil gauge for observing oil level
• Efficient oil separator
• Easy to make an inspection and maintain the exhaust valve storage
• Easy cleaning oil tank becaus of a large cleanout
• Quickly discharge the oil accumulated in oil tanks via the oil drain valve
• Easily maintained shaft sealing assembly

Specifications

*1: Applies to the time from atmospheric pressure to 7 kPa with a tank free of leakage or gas emissions.
*2: Maximum cooling water temperature should be 30℃.
-Allowable ambient temperature: 10 to 40℃ during operation, -5 to +60℃ in storage.
-Drain water before storing to prevent freezing over.

Dimensions

Features

• Stable and continuous operation at high pressures (low vacuum zones)
• Withstanding operation characterized by severe repetition
• Robust exhaust valve
• Sight glass for observing oil circulation
• Oil gauge for observing oil level
• Efficient oil separator
• Easy to make an inspection and maintain the exhaust valve storage
• Easy cleaning oil tank becaus of a large cleanout
• Quickly discharge the oil accumulated in oil tanks via the oil drain valve
• Easily maintained shaft sealing assembly

Specifications

*1: Applies to the time from atmospheric pressure to 7 kPa with a tank free of leakage or gas emissions.
*2: Maximum cooling water temperature should be 30℃.
-Allowable ambient temperature: 10 to 40℃ during operation, -5 to +60℃ in storage.
-Drain water before storing to prevent freezing over.

Dimensions

Features

• Stable and continuous operation at high pressures (low vacuum zones)
• Withstanding operation characterized by severe repetition
• Robust exhaust valve
• Sight glass for observing oil circulation
• Oil gauge for observing oil level
• Efficient oil separator
• Easy to make an inspection and maintain the exhaust valve storage
• Easy cleaning oil tank becaus of a large cleanout
• Quickly discharge the oil accumulated in oil tanks via the oil drain valve
• Easily maintained shaft sealing assembly

Specifications

*1: Applies to the time from atmospheric pressure to 7 kPa with a tank free of leakage or gas emissions.
*2: Maximum cooling water temperature should be 30℃.
-Allowable ambient temperature: 10 to 40℃ during operation, -5 to +60℃ in storage.
-Drain water before storing to prevent freezing over.

Dimensions

Features

• Stable and continuous operation at high pressures (low vacuum zones)
• Withstanding operation characterized by severe repetition
• Robust exhaust valve
• Sight glass for observing oil circulation
• Oil gauge for observing oil level
• Efficient oil separator
• Easy to make an inspection and maintain the exhaust valve storage
• Easy cleaning oil tank becaus of a large cleanout
• Quickly discharge the oil accumulated in oil tanks via the oil drain valve
• Easily maintained shaft sealing assembly

Specifications

• Applies to the time from atmospheric pressure to 7 kPa with a tank free of leakage or gas emissions.
  Maximum cooling water temperature should be 30℃.
  Allowable ambient temperature: 10 to 40℃ during operation, -5 to +60℃ in storage.
  Drain water before storing to prevent freezing over.

Dimensions

Features

• Stable and continuous operation at high pressures (low vacuum zones)
• Withstanding operation characterized by severe repetition
• Robust exhaust valve
• Sight glass for observing oil circulation
• Oil gauge for observing oil level
• Efficient oil separator
• Easy to make an inspection and maintain the exhaust valve storage
• Easy cleaning oil tank becaus of a large cleanout
• Quickly discharge the oil accumulated in oil tanks via the oil drain valve
• Easily maintained shaft sealing assembly

Specifications

• Applies to the time from atmospheric pressure to 7 kPa with a tank free of leakage or gas emissions.
• Maximum cooling water temperature should be 30℃.
• Please contact us if an explosion-proof motor is considered.
• Allowable ambient temperature: 10 to 40℃ during operation, -5 to +60℃ in storage.
  Drain water before storing to prevent freezing over.

Dimensions

Features

• Stable and continuous operation at high pressures (low vacuum zones)
• Withstanding operation characterized by severe repetition
• Robust exhaust valve
• Sight glass for observing oil circulation
• Oil gauge for observing oil level
• Efficient oil separator
• Easy to make an inspection and maintain the exhaust valve storage
• Easy cleaning oil tank becaus of a large cleanout
• Quickly discharge the oil accumulated in oil tanks via the oil drain valve
• Easily maintained shaft sealing assembly

Specifications

*1: Applies to the time from atmospheric pressure to 7 kPa with a tank free of leakage or gas emissions.
*2: Maximum cooling water temperature should be 30℃.

• Allowable ambient temperature: 10 to 40℃ during operation, -5 to +60℃ in storage.
• Drain water before storing to prevent freezing over.

Dimensions

Features

• Stable and continuous operation at high pressures (low vacuum zones)
• Withstanding operation characterized by severe repetition
• Robust exhaust valve
• Sight glass for observing oil circulation
• Oil gauge for observing oil level
• Efficient oil separator
• Easy to make an inspection and maintain the exhaust valve storage
• Easy cleaning oil tank becaus of a large cleanout
• Quickly discharge the oil accumulated in oil tanks via the oil drain valve
• Easily maintained shaft sealing assembly

Specifications

*1: Applies to the time from atmospheric pressure to 7 kPa with a tank free of leakage or gas emissions.
*2: Maximum cooling water temperature should be 30℃.
-Allowable ambient temperature: 10 to 40℃ during operation, -5 to +60℃ in storage.
-Drain water before storing to prevent freezing over.

Dimensions

Features

• Clean Vacuum
•   No oil back-streaming to the chamber.
• Maintenance Free
• 　No time gear means no lubricating oil to be maintained.
• 　Maintenance free due to no chip seal change or oil change is required.
• Compact
• 　Small-size, lightweight, and easy to carry.
• Air-Cooled Type
• 　No utility required other than the electricity.
• High-Speed Pump Down
• 　Large pumping speed at close to atmospheric pressure range by the bypass line.
• Energy Efficient
• 　Low power consumption design

Specifications

Dimensions

Features

• Enable operation from atmospheric pressure.
• Volume flow rate is 800L/min at atmospheric pressure.
• Enable handing water vapor.
• Vapor tolerance is 500g/hr.
• Reducing evaculation time.
• Consatnt volume flow rate 800L/min over wide pressure range to ultimate pressure.
• Air cooling.

Specifications

*1 It is an amount of the maximum processing when the gas ballast is “ON”.
*2 Contact Osaka Vacuum for special specification.

Dimensions

Features

• ER100D/ER100DC are among the best in the class in energy efficiency as well as lightness and compactness
• Energy consumption at ultimate pressure: 400W
• Footprint: 0.11m²
• Weight: 60kg
• Two types are available for your needs.
• ER100D: for light load, non-corrosive gas pumping
• ER100DC: employs anti-corrosive materials, for corrosive gas pumping

Specifications

[Corresponding gases]
Some types of gas to be evacuated may damage the pump.
Contact Osaka Vacuum for a list of applicable gas types.

Dimensions

Features

• Strong rotary shaft.
  → Enables start-up and continuous operation in low vacuum.
  Optimal motor capacity can be selected to fit the specific load.
  → Less equipment cost, less operation cost.
  Wide range of pump speed lineup.
  → 90～12,000m³/h
  Work with various backing pumps.
  →Roots＋oil-sealed rotary, liquid-ring

Specifications

*1 : The effective volume flow rate varies according to the backing pump. For details, contact our sales representative.
*2 : Maximum cooling water temperature should be 30℃.
-Allowable ambient temperature: 10 to 40℃ during operation, -5 to +60℃ in storage.
-Drain water before storing to prevent freezing over.

Dimensions

Features

• Strong rotary shaft.
  → Enables start-up and continuous operation in low vacuum.
• Optimal motor capacity can be selected to fit the specific load.
  → Less equipment cost, less operation cost.
• Wide range of pump speed lineup.
  → 90～12,000m3/h
• Work with various backing pumps.
  →Roots＋oil-sealed rotary, liquid-ring

Specifications

*1 : The effective volume flow rate varies according to the backing pump. For details, contact our sales representative.
*2 : Maximum cooling water temperature should be 30℃.
-Allowable ambient temperature: 10 to 40℃ during operation, -5 to +60℃ in storage.
-Drain water before storing to prevent freezing over.

Dimensions

Features

• Strong rotary shaft.
  → Enables start-up and continuous operation in low vacuum.
  Optimal motor capacity can be selected to fit the specific load.
  → Less equipment cost, less operation cost.
  Wide range of pump speed lineup.
  → 90～12,000m3/h
  Work with various backing pumps.
  →Roots＋oil-sealed rotary, liquid-ring

Specifications

*1 : The effective volume flow rate varies according to the backing pump. For details, contact our sales representative.
*2 : Maximum cooling water temperature should be 30℃.
-Allowable ambient temperature: 10 to 40℃ during operation, -5 to +60℃ in storage.
-Drain water before storing to prevent freezing over.

Dimensions

Features

• Strong rotary shaft.
  → Enables start-up and continuous operation in low vacuum.
  Optimal motor capacity can be selected to fit the specific load.
  → Less equipment cost, less operation cost.
  Wide range of pump speed lineup.
  → 90～12,000m3/h
  Work with various backing pumps.
  →Roots＋oil-sealed rotary, liquid-ring

Specifications

*1 : The effective volume flow rate varies according to the backing pump. For details, contact our sales representative.
*2 : Maximum cooling water temperature should be 30℃.
-Allowable ambient temperature: 10 to 40℃ during operation, -5 to +60℃ in storage.
-Drain water before storing to prevent freezing over.

Dimensions

Features

• Strong rotary shaft.
  → Enables start-up and continuous operation in low vacuum.
• Optimal motor capacity can be selected to fit the specific load.
  → Less equipment cost, less operation cost.
• Wide range of pump speed lineup.
  → 90～12,000m3/h
• Work with various backing pumps.
  →Roots＋oil-sealed rotary, liquid-ring

Specifications

*1 : The effective volume flow rate varies according to the backing pump. For details, contact our sales representative.
*2 : Maximum cooling water temperature should be 30℃.
-Allowable ambient temperature: 10 to 40℃ during operation, -5 to +60℃ in storage.
-Drain water before storing to prevent freezing over.

Dimensions

Features

• Strong rotary shaft.
  → Enables start-up and continuous operation in low vacuum.
  Optimal motor capacity can be selected to fit the specific load.
  → Less equipment cost, less operation cost.
  Wide range of pump speed lineup.
  → 90～12,000m³/h
  Work with various backing pumps.
  →Roots＋oil-sealed rotary, liquid-ring

Specifications

*1 : The effective volume flow rate varies according to the backing pump. For details, contact our sales representative.
*2 : Maximum cooling water temperature should be 30℃.
-Allowable ambient temperature: 10 to 40℃ during operation, -5 to +60℃ in storage.
-Drain water before storing to prevent freezing over.

Dimensions

Features

• Strong rotary shaft.
  → Enables start-up and continuous operation in low vacuum.
• Optimal motor capacity can be selected to fit the specific load.
  → Less equipment cost, less operation cost.
• Wide range of pump speed lineup.
  → 90～12,000m3/h
• Work with various backing pumps.
  →Roots＋oil-sealed rotary, liquid-ring

Specifications

• Allowable ambient temperature: 10 to 40℃ during operation, -5 to +60℃ in storage.
• Drain water before storing to prevent freezing over.

Dimensions

Features

• Strong rotary shaft.
  → Enables start-up and continuous operation in low vacuum.
• Optimal motor capacity can be selected to fit the specific load.
  → Less equipment cost, less operation cost.
• Wide range of pump speed lineup.
  → 90～12,000m³/h
• Work with various backing pumps.
  →Roots＋oil-sealed rotary, liquid-ring

Specifications

*1 : The effective volume flow rate varies according to the backing pump. For details, contact our sales representative.
*2 : Maximum cooling water temperature should be 30℃.
-Allowable ambient temperature: 10 to 40℃ during operation, -5 to +60℃ in storage.
-Drain water before storing to prevent freezing over.

Dimensions

Features

• High vacuum exhaust unit.
• Exhaust up to high vacuum with a simple operation.
• Since it has casters, it can be easily moved to the desired place for use.
• Mounted with a turbo molecular pump from the TG-F series which is resistant to disturbance!
  This unit is portable while it is operating.
• Optional devices and apparatuses are available to match your needs.

Specifications

1 : Figures in parenthesis represent exhaust rate with protective steel mesh.
In addition to our standard specifications, we can also manufacture exhaust units designed to customer requirements. (For details, contact our sales representative)

Dimensions

Reprinting prohibited without permission. Contents are subject to change without notice.

Features

• More compact ST series has come out!
• Mounted with high compression turbo molecular pump TG70F!
• One of two kinds of backing pump (diaphragm pump) can be selected to match for exhausting chamber!
• Space saving design of A4 laptop size!
• Most suitable for use as easy operating and portable pumping units for R&D!

Specifications

*1 : The muffler is installed in the outlet of diaphragm pump.

Dimensions

Features

• High vacuum exhaust unit.
• Exhaust up to high vacuum with a simple operation.
• Easy to control with touch panel.
• Since it has casters, it can be easily moved to the desired place for use.
• Mounted with a turbo molecular pump from the TG-F series which is resistant to disturbance!
  This unit is portable while it is operating.
• Optional devices and apparatuses are available to match your needs.

Specifications

※ (1): With protective screen
※ (2): Gas ballast opened

Dimensions

• Reprinting prohibited without permission. Contents are subject to change without notice.

Features

• Standard types and corrosive resistant types are available.
• The world’s largest volume flow rate compound molecular pump.
• Durable structure for air inrush.
• Sturdy resists external impacts.

Specifications

• *1: When using a backing vacuum pump of 3000L/min.
• [Ambient temperature for use]
• The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.

Dimensions

• Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
  Reprinting prohibited without permission. Contents are subject to change without notice.

Features

• Standard types and corrosive resistant types are available.
• The world’s largest volume flow rate compound molecular pump.
• Durable structure for air inrush.
• Sturdy resists external impacts.

Specifications

• *1: When using a backing vacuum pump of 3000L/min.
• [Ambient temperature for use]
• The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.

Dimensions

• Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
  Reprinting prohibited without permission. Contents are subject to change without notice.

Features

• Corrosive resistant type for corrosive gases.
• Durable structure for air inrush.
• Sturdy resists external impacts.
• Serial communication
  ※RS232C Serial interface
• Conforms to recognized safety standard
  NRTL / SEMI-S2 / CE

Specifications

• *1: When using a backing vacuum pump of 3000L/min.
• [Ambient temperature for use]
• The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.

Dimensions

Features

• Corrosive resistant type for corrosive gases.
• Durable structure for air inrush.
• Sturdy resists external impacts.
• Serial communication
  ※RS232C Serial interface
• Conforms to recognized safety standard
  NRTL / SEMI-S2 / CE

Specifications

• *1: When using a backing vacuum pump of 1000L/min.
• [Ambient temperature for use]
• The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.

Dimensions

• Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
  Reprinting prohibited without permission. Contents are subject to change without notice.

Features

• Corrosive resistant type for corrosive gases.
• Durable structure for air inrush.
• Sturdy resists external impacts.
• Serial communication
  ※RS232C Serial interface
• Conforms to recognized safety standard
  NRTL / SEMI-S2 / CE

Specifications

• *1: When using a backing vacuum pump of 3000L/min.
• [Ambient temperature for use]
• The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.

Dimensions

• Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
  Reprinting prohibited without permission. Contents are subject to change without notice.

Features

• Corrosive resistant type for corrosive gases.
• Durable structure for air inrush.
• Sturdy resists external impacts.
• Serial communication
  ※RS232C Serial interface
• Conforms to recognized safety standard
  NRTL / SEMI-S2 / CE

Specifications

*1: When using a backing vacuum pump of 1000L/min.

[Ambient temperature for use]

The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.

Dimensions

• Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
  Reprinting prohibited without permission. Contents are subject to change without notice.

Features

• Corrosive resistant type for corrosive gases.
• Durable structure for air inrush.
• Sturdy resists external impacts.
• Serial communication
  ※RS232C Serial interface
• Conforms to recognized safety standard
  NRTL / SEMI-S2 / CE

Specifications

• *1: When using a backing vacuum pump of 1000L/min.
• [Ambient temperature for use]
• The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.

Dimensions

• Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
• Reprinting prohibited without permission. Contents are subject to change without notice.

Features

• Corrosive resistant type for corrosive gases.
• Durable structure for air inrush.
• Sturdy resists external impacts.
• Serial communication
  ※RS232C Serial interface
• Conforms to recognized safety standard
  NRTL / SEMI-S2 / CE

Specifications

• *1: When using a backing vacuum pump of 1000L/min.
• [Ambient temperature for use]
• The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.

Dimensions

• Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
  Reprinting prohibited without permission. Contents are subject to change without notice.

Features

• Corrosive resistant type for corrosive gases.
• Durable structure for air inrush.
• Sturdy resists external impacts.
• Serial communication
• ※RS232C Serial interface
• Conforms to recognized safety standard
  NRTL / SEMI-S2 / CE

Specifications

• *1: When using a backing vacuum pump of 500L/min.
• [Ambient temperature for use]
• The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.

Dimensions

• Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
  Reprinting prohibited without permission. Contents are subject to change without notice.

Features

• Corrosive resistant type for corrosive gases.
• Durable structure for air inrush.
• Sturdy, resists external impacts.
• Serial communication
  ※RS232C Serial interface
• Conforms to recognized safety standard
  NRTL / SEMI-S2 / CE

Specifications

Dimensions

• Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
  Reprinting prohibited without permission. Contents are subject to change without notice.

Features

• All helical groove stage type rotor
• High gas throughput at medium to low vacuum
• Durable structure against more than 300,000 times of air inrush
• Conformance to safety standards: NRTL / SEMI-S2 / CE

Specifications

*1: 1Pa・L/s(25℃)=0.543sccm(0℃, 1atm)
*2: When using a backing vacuum pump of 1000L/min.
*3: Pressure attained after 48 hours of bake-out.

Dimensions

・All bolt holes of the inlet flanges straddle the centerlines.
* Reprinting is prohibited without permission. Contents are subject to change without notice.

Features

• All helical groove stage type rotor
• High gas throughput at medium to low vacuum
• Durable structure against more than 300,000 times of air inrush
• Conformance to safety standards: NRTL / SEMI-S2

Specifications

*1: 1Pa・L/s(25℃)=0.543sccm(0℃, 1atm)
*2: When using a 160L/min backing pump
*3: Pressure attained after 48 hours of bake-out.

Dimensions

・All bolt holes of the inlet flanges straddle the centerlines.
* Reprinting is prohibited without permission. Contents are subject to change without notice.

Features

• Energy-saving design
• A memory function in pump body is equpped to store operation data, setting parameter, abnormal history, and so on.
• ※All the data can be transferred even if the controller is replaced during an overhaul.
• Various communication interfaces　　EtherCAT compatible
• International standard    CE/NRTL/SEMI-S2 certified

Specifications

^*1 Please contact us for the specific model name.
^*2 Specifications may vary depending upon the model.
^*3 1 Pa·L/s (25 °C) = 0.543 sccm (0 °C, 1 atm).
^*4 When the pump is backed by a 5000 L/min backing pump.
^*5 Pressure attained after 48 hours of bake-out.
^*6 Maximum foreline pressure at which the pump can continue to run without triggering the fail-safe acceleration-shutdown feature.