Azbil Corporation
Azbil MCS100 Mass Flow Sensor
Manufacture: Azbil Corporation
Model: MCS100
The model MCS100 is a compact and fast response mass flow sensor created from original MEMS sensor technology with millions of shipments.
By combining a thermal MEMS sensor and a low pressure loss flow path, this flow sensor can measure Air, Nitrogen and Oxygen* flow under 10L/min with 5ms fast response, which can also detect flow direction or slight flow rate changes.
* Fluid conditions for use with Oxygen : supply pressure 50 kPa or less, concentration 95% or less.
Summary
The model MCS100 is a compact and fast response mass flow sensor created from original MEMS sensor technology with millions of shipments.
By combining a thermal MEMS sensor and a low pressure loss flow path, this flow sensor can measure Air, Nitrogen and Oxygen* flow under 10L/min with 5ms fast response, which can also detect flow direction or slight flow rate changes.
* Fluid conditions for use with Oxygen : supply pressure 50 kPa or less, concentration 95% or less.
Measuring Mass Flow Rate
Can measure mass flow rate according to the standard condition (20℃, 1 atm) of gas without temperature nor pressure compensation.
Compact and Lightweight
Small and light weight which can be installed wherever, it’s suited for a variety of flow measurements in such as laboratory and various industry applications. (33.5 x 10.5 x 17.0 mm, just 9g, without cable)
Fast response time : 5ms
Detects even slight changes in the flow rate. Suitable for fast takt time applications.
Bidirectional flow range
Detect the direction in which the gas flows. Suitable for instrumentation where the flow direction changes.
Low power consumption: 12mA max. at 24Vdc
Suitable for battery-driven use on handheld devices
Free mounting position and not required straight piping length
Suitable for a variety of flow measurements in areas such as laboratory and various industry applications
Measurement flow range line-up
One-way flow range
MCS100A104 : 0 to 3L/min
MCS100A112 : 0 to+500mL/min
MCS100A116 : 0 to 5L/min
MCS100A120 : 0 to 10L/min
Bidirectional flow range
MCS100A100 : -3 to +3 L/min
MCS100A108 : -500 to +500mL/min
MCS100A128 : -10 to +10L/min
Construction specification
- Material
Parts contacted to gas : PPS resin, Ceramic (printed wiring board), Brass (piping connection) Cover : PC resin - Piping connection : M5 female (brass insertion)
- Operating temperature range : 0 to 50℃
- Operating pressure range : -70 to 200kPa
- Pressure resistance : 300kPa
Accessories
Multi channel indicator model MCW401
Designed for remotely display unit with up to 4pcs MCS100.
It also produces open collector switch output.
Additionally, by means of RS-232C communication, PC or PLC can be used to set parameter and to view instantaneous flow value and switch status of each channel. 4 types of “Window comparator mode” suitable for pick-up & placing applications and “Hysteresis mode” suitable for general flow monitoring, as switching operation.
Model MCW401 can be applied with below MCS100 models.
Model MCW401 can be applied with below MCS100 models.
Applications
Control of suction flow rate in air volume samplers, gas detectors, etc.
- Measures the mass flow rate intake of the pump without effects from temperature fluctuation or changes in atmospheric pressure.
- Operates on battery power on handheld equipment.
Control or monitoring of supply flow rate for oxygen concentrators, etc.
- Useful for control of oxygen flow rate from compressor, without effects from fluctuation in room temperature or altitude.
- Useful for replacing from a float meter.
- Can be used for oxygen with a concentration up to 95 % that is supplied at up to 50 kPa.
- The gas-contacting parts of this product are not degreased for use with oxygen.
Monitoring of purge rate or cooling flow rate for wire bonders, etc.
- Measures flow rate of air supplied to eliminate heat haze.
- Measures flow rate of nitrogen supplied to prevent oxidation.
- Useful for replacing from a float meter or pressure gauge.
Pick-up and placement detection of miniature electrical or optical devices.
- Can be installed close to the pick-up nozzle.
- Fast response is suitable for pick-up detection.
- Measures slight differences in flow rate which cannot be detected by pressure.
- Not affected by fluctuation in suction pressure, thanks to mass flow measurement.
- Clogged or crushed nozzle is detectable by analog output.
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