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- Chiyoda Seiki EX-M-500 Excellent Mega Series Electropolishing (Primary pressure: 3.0 MPa or less/adjustment pressure 0.1 to 1.0 MPa, maximum flow rate: 50 ℓ, 150 ℓ/min・Air)
Chiyoda Seiki, Japan
Chiyoda Seiki EX-M-500 Excellent Mega Series Electropolishing (Primary pressure: 3.0 MPa or less/adjustment pressure 0.1 to 1.0 MPa, maximum flow rate: 50 ℓ, 150 ℓ/min・Air)
Made in Japan
Manufacturer: Chiyoda Seiki
Model: EX-M-500
Feature
Super-sealed structure with external leakage of 5×10-11Pa-m3/sec. or less.
Ultra-clean finish to minimize particles.
Ultra-clean pressure gauges (Clean M) are used. （All gas contacting parts are treated with EP (including electrolytic polishing and VCR joints).
Applications
High-purity gas supply system for ultra LSI manufacturing.
Supply systems for ultra-pure gases and mixed gases.
Various gas systems requiring ultra-cleanliness and ultra-high purity.
Panel Mounting
Panel hole: Φ36.5mm
Panel thickness: 4.5 mm or less
Mounting nut side to side: 41mm
Specifications
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