HILTEC Powder Trap HT Series

Manufacturer: HILTEC Ltd.
Product: Powder Trap HT Series

Description

The Powder Trap HT series is a filter that captures reaction products exhausted mainly from semiconductor and liquid crystal manufacturing equipment (ion implantation, CVD, etching process). The trap function in front of the filter and the pleated cartridge with a large capture area with electroplating effect enable low pressure loss and long life.

Features

Promotes the growth of reaction products.
It uses a pleated cartridge with a large capture area.
The pleated cartridge results in low pressure loss.
The cartridge uses electrochemically treated filter material to capture even fine powder.
It can be installed on the vacuum line or exhaust line of a dry pump.

Applications

■Ion implantation equipment

■CVD equipment
■Etching equipment etc.

Effect

■Prevention of clogging of pipes
■Prevention of breakdown of dry pumps and vacuum pumps
■Reduction of downtime
■Reduction of maintenance

Specification

ModelExternal dimensionsConnection fittingsweightMaximum specified pressureRelief valve operating pressureBody Material

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