Product Made in Japan
Manufacturer: Just Corporation
Model: LZS

Product Summary

It is already known that increasing the temperature of pure water improves the cleaning effect in semiconductor and electronic component manufacturing processes. This product is a heating unit that consists of a shell-type heater for pure water and a control unit, and efficiently heats pure water up to a maximum of 90°C.

Features

The fluid contact parts of the shell body are made of SUS304 and have a special surface treatment.

The heater element is made of φ12 SUS316L with a special surface treatment, and the watt density is designed at 4W/ cm2 for safety and efficiency .

High-precision temperature control is achieved with the dedicated controller. It also has a safety design with an overheat prevention function.

■ Control

 Heater circuit configuration

　・Control heater x 1 circuit

　- Base heater x 2 circuits

Control method

　・Control heater PID control SSR drive

　- Base heater: 1 circuit always ON, 1 circuit ON/OFF switching

■ Safety devices

Earth leakage breaker
Temperature alarm
Overheat prevention function

Appearance and Dimensions

Specification