Manufacturer: KOGANEI CORPORATION

Features

This design delivers a low particle structure by using an extremely smooth inner tube surface with a roughness of Rt 0.3 micrometers or less, and it applies high purity PFA material. As a result, the pump generates almost no particles during operation, and it reduces wet surface area to about one fifth compared with conventional bellows pumps. Therefore, the system supports clean and stable chemical dispensing in sensitive processes.

In addition, the pump provides excellent solution replacement characteristics. Because the pump chamber follows an ideal flow path and leaves almost no liquid residue, it consistently dispenses fresh solution. Consequently, process quality improves, and contamination risk decreases.

Moreover, the flow structure promotes effective bubble removal. Since liquid flows from the bottom upward, bubbles naturally move toward the discharge port. As a result, bubbles do not affect dispensing accuracy, and the pump maintains high precision output. Furthermore, during startup or solution filling, operators can easily remove air bubbles, which makes this system suitable even for liquids that tend to generate bubbles.

At the same time, the compact and high precision operation enhances installation flexibility. The unique OCT pump structure creates a compact appearance, which suits side by side installations. In addition, a five phase stepping motor and a precision feed screw deliver high resolution and excellent repeatability. An encoder also detects potential faults such as accidental step out, so reliability improves further.

Finally, the simple and highly reliable construction strengthens long term performance. By sealing liquid between coaxial bellows and a welded tube joint section, the structure prevents liquid leakage and blocks air penetration. Therefore, the pump maintains high precision with fewer sealing points, and it achieves higher reliability than conventional pumps that rely on multiple seals.

Specifications