The liquid contact area uses Teflon, and this design supports reliable handling of a wide range of liquid chemicals. As a result, the system maintains strong chemical resistance and stable performance over long operating periods. In addition, the bellows method eliminates sliding portions, so particle generation becomes almost nonexistent. Therefore, the process stays clean and well suited for high-purity applications. Moreover, users can set the dispensing volume easily by using an adjustment nut, which allows quick and accurate tuning. At the same time, the system achieves low operating cost by using an air cylinder, and this approach improves efficiency while reducing overall maintenance effort.
KOGANEI CORPORATION
Koganei Pneumatic Bellows Pump F-APB Series

Manufacturer: KOGANEI CORPORATION
Features
Specifications
| Model | F-APB08-6W | F-APB15-8W | F-APB40-7W | F-APB60-1W |
| Media | Photoresist solution, pure water, chemical solution | |||
| Maximum dispensing volume | 8 mL | 15 mL | 40 mL | 60 mL |
| Maximum dispensing pressure | 0.05 MPa | |||
| Repeatability of dispensing volume | ±1% F.S. | |||
| Proof pressure | 0.15 MPa | |||
| Mass | 1.3 kg | 1.4 kg | 2.8 kg | 3.2 kg |
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