Kuwana Metals
Kuwana Metals Aera FC-R7800 Series Mass Flow Controller
Manufacturer: Kuwana Metals, Ltd.
Model : Aera FC-R7800 Series
Features
- Corrosion-resistant design
- Metal seals
- VCR^TM compatible connections
- Full-scale flow ranges from 10 SCCM to 50 SLM
- Normally-closed or normally-open solenoid control valve
- Leak integrity of 1×10^-10 atm-cc/s of He
Benefits
- Fast response— ≤ 1 s flow-settling time
- Outstanding reliability
- Easy integration—standard connectors and dimensions
- Superior results—high-quality thin-film characteristics
Specifications
| Operational | FC-R7800CD/FC-R7800D Series | FC-R7810CD/FC-R7810D Series |
|---|---|---|
| Full-Scale Range | 10 SCCM to 5 SLM | 5 to 20 SLM |
| Response Time | ≤ 1 s to within ±2% of full scale 0→100%, Typical, SEMI E17-91 | |
| Flow Accuracy with calibration gas @22°C±3°C, Zero <±0.1% of full-scale | ≤ ±1% of full scale | ≤ ±1% of full scale flow (< ±2% of full-scale flow greater than ≤ 20SLM) |
| Linearity | ≤ ±0.5% of full scale | ≤ ±0.5% of full scale¹ |
| Repeatability | ≤ ±0.2% of full scale | |
| Leak Integrity | 1×10^-10 atm-cc/s (He) max;1×10^-11 Pa·m³/s (He) max | |
| Flow Control Range | 2 to 100% of full scale | |
| Normal Operating Pressure | 49 to 275kPaD | 69 to 275kPaD² |
| Maximum Operating Pressure | 490kPaG | |
| Proof Pressure | 1MPaG | |
| Operating Temperature Range | 5 to 45°C (41 to 113°F)Gas temperature needs to be the same as the atmospheric temperature. | |
- ※1: Less than ±1% for Full Scale Flow greater than 20SLM
- ※2: Normally open valve model
- [20SLM < N2 density flow ≤ 30SLM] 147 to 275kPaD
- [30SLM < N2 density flow ≤ 50SLM] 196 to 275kPaD
- Normally close valve model
- [20SLM < N2 density flow ≤ 50SLM] 147 to 275kPaD
- These specifications are valid only in lab conditions used in factory testing, with standard configuration.
| Physical | FC-R7800CD/FC-R7800D Series | FC-R7810CD/FC-R7810D Series |
|---|---|---|
| Control Valve Type | Normally-open or normally-closed solenoid | |
| External seals | Metal—316L | |
| Materials | Stainless-steel type 316L, 316, PTFE, Magnetic Stainless(Fluoro Rubber, Chloroprene Rubber)* | |
| Standard Fittings | 1/4″ VCR^TM compatible | |
| Orientation | May be mounted in any position | |
| Mass | 1.0 kg (2.2 lb) | |
- Fluoro Rubber or Chloroprene Rubber is when N2 density flow is 11.096 SLM or greater, and also depending on the gas.
| Electrical | FC-R7800CD/FC-R7800D Series | FC-R7810CD/FC-R7810D Series |
|---|---|---|
| Input Power | +15 VDC ±2%, 25 mA -15 VDC ±2%, 180 mA |
|
| Power Consumption | 3.1 W max | |
| Command Signal | 0 to 5 VDC Input impedance > 1MΩ | |
| Output signal | 0 to 5 VDC Load impedance > 2kΩ | |
Electrical Connections
| 9-Pin D-sub, pin contact connector | |
|---|---|
| 1 | VALVE OPEN/CLOSE* |
| 2 | OUTPUT(DC 0〜5V/0-100%) |
| 3 | POWER DC +15V |
| 4 | COMMON |
| 5 | POWER DC -15V |
| 6 | CONTROL (DC 0〜5V/0-100%) |
| 7 | COMMON |
| 8 | COMMON |
| 9 | VALVE TEST PT.(DC 0〜-13V) |
- Connection to +15V OPEN, Connection to -15V : CLOSE (Normally closed valve model)
- Connection to +15V CLOSE, Connection to -15V : OPEN (Normally open valve model)
Model and Suffix Codes
| Category | Description | Suffix Codes | |||||||
|---|---|---|---|---|---|---|---|---|---|
| Product Type | Mass flow controller | FC- | … | … | … | … | … | … | … |
| RoHS Compliance | Compliant with RoHS directives | … | R | … | … | … | … | … | … |
| Full-Scale Range | 10 SCCM to 5 SLM | … | … | 7800 | … | … | … | … | … |
| 5 to 50 SLM | … | … | 7810 | … | … | … | … | … | |
| Control Valve | Normally-closed | … | … | … | C | … | … | … | … |
| Normally-open | … | … | … | (Blank) | … | … | … | … | |
| Connector | Aera 9-Pin D | … | … | … | … | D | … | … | … |
| Fittings | 1/4” VCR^TM compatible | … | … | … | … | … | 4V | … | … |
| Gas | Type of gas | … | … | … | … | … | … | N2 | … |
| Flow | Flow range of gas (SCCM or SLM) | … | … | … | … | … | … | … | 200 |
| Single-Gas Example | FC- | R | 7800 | C | D | 4V | N2 | 200 SCCM | |
| (MFC, RoHS compliant, with 9-pin D connector, normally-closed valve, 1/4” VCRTM fittings, N2 gas, 200 SCCM full-scale range) | |||||||||
Dimensions
| FC-R7800CD/FC-R7800D Series | FC-R7810CD/FC-R7810D Series | |
|---|---|---|
| A | 124.0 mm (4.88″) | |
| B | 12.7 mm (0.50″) | |
| C | 132.0 mm (5.20″) | |
| D | 28.6 mm (1.13″) | |
| E | 18 mm (0.71″) | |
| F | 69.0 mm (2.72″) | |
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