- Home
- Products
- Kuwana Metals Aera HG200 Series HC100/HM100 Series Pressure Insensitive (PI) Mass Flow Controller/Digital Mass Flow Controller (Non-PI) Mass Flow Meter
Kuwana Metals
Kuwana Metals Aera HG200 Series HC100/HM100 Series Pressure Insensitive (PI) Mass Flow Controller/Digital Mass Flow Controller (Non-PI) Mass Flow Meter
Manufacturer: Kuwana Metals, Ltd.
Model : Aera HG200 Series, HC100/HM100 Series
Features
- Quick flow-response, 0.3s (HG200 series)
- 10 million cycle life guarantee
- DeviceNet^TM, RS485/analog, EtherCAT®
- Self-diagnostic/response learning function (HG200 series)
Other Features
- Multi-gas, Multi-range selection
- 9 BIN sizes, enabling control from 10 SCCM to 50 SLM
- High accuracy, ±1% S.P. @10-100% (N₂)
- Wide flow control range, 0.5-100% F.S. (NC type with PCTFE poppet model)
- High valve shut-off performance, 0.1% F.S. (NC type with PCTFE poppet model)
- Wide temperature range 15-50°C
- RoHS / CE compliant
- Pressure Insensitive function (HG200 series)
Electrical Connection
Analog model (9 Pin D-sub) male type (M3 screw)
| 1 | VALVE OPEN/CLOSE (except HM100 / HM101) Connect to +15V : OPEN Connect to -15V : CLOSE |
| 2 | OUTPUT(0-5VDC/ 0-100% F.S.) |
| 3 | INPUT POWER(+15VDC) |
| 4 | POWER COMMON |
| 5 | INPUT POWER(-15VDC) |
| 6 | SET POINT INPUT(except HM100 / HM101) (0-5VDC/0-100% F.S.) |
| 7 | SIGNAL COMMON |
| 8 | SIGNAL COMMON |
| 9 | VALVE voltage output (0-4V / 0-100%) (except HM100/HM101) |
RS485 model 9Pin D-sub male type (M3 screw)
| 1 | NA |
| 2 | NA |
| 3 | INPUT POWER(+15VDC) |
| 4 | POWER COMMON |
| 5 | INPUT POWER(-15VDC) |
| 6 | NA |
| 7 | SIGNAL COMMON |
| 8 | RS485+ |
| 9 | RS485+ |
DeviceNet^TM model CM02-8DR5P-CF (D5) DDK
| 1 | SHIELD |
| 2 | INPUT POWER (+11 -25VDC) |
| 3 | GND(-) |
| 4 | CAN(H) |
| 5 | CAN(L) |
EtherCAT® model (Power connector) XS3M-M524-201 OMRON
| 1 | +24VDC |
| 2 | FG |
| 3 | POWER COMMON (0V) |
Specification
| Items | HG200 / HC100 / HM100 | HG201 / HC101 / HM101 | |
|---|---|---|---|
| Full-Scale Range (N2 equivalent flow) | 10-5,000SCCM (Multi-1-6) | 5,001-10,000SCCM (Multi-7) | 10,001-50,000SCCM (Multi-8, 9) |
| Flow Sensing | Thermal Sensor Type | ||
| Flow Calibration | Multi Gas, Multi Range (9 BINs) | ||
| Settling Time (SEMI™ E17-91)² | HG200 / HG201: < 0.3s (Multi-1-5), < 0.5s (Multi-6, 7) HC100 / HC101: < 1.0s (Multi-1-7) | HG201: < 0.7s (Multi-8, 9) HC101: < 1.0s (Multi-8, 9) | |
| Accuracy (N₂)³ | < ±1%S.P. (10 – 100%), < ±0.1%F.S. (2 – 10%) | ||
| Linearity | ≤ ±0.5% F.S. | ||
| Repeatability | ≤ ±0.2% F.S. | ||
| Zero Stability | < ±0.3%F.S. / year | ||
| Leak Integrity | 1×10^-11 Pam³/s (He) | ||
| Flow control range^4 (except HM100 / HM101) | 0.5 – 100%F.S. (PCTFE poppet model), 2 – 100%F.S. (Metal poppet, Normally-Opened model) | ||
| Operating Upstream Pressure Range (N₂) | 50 – 400kPaG (Multi-1-6) | 70 – 400kPaG (Multi-7) | 250 – 400kPaG (Multi-8,9) |
| Operating Pressure Range (HM100 / HM101) | 20kPaD | ||
| Maximum Operating Upstream Pressure | 400kPaG | ||
| Operating Downstream Pressure Range | Vacuum to atmospheric pressure | ||
| Leak Across Valve (except HM100 / HM101) | < 0.1% F.S. (PCTFE poppet), < 1.0% F.S. (Metal poppet, Normally-Opened model) [N₂ P1=50kPaG (Multi-1-6), 70kPaG (Multi-7), 250kPaG (Multi-8, 9), P2=atmospheric pressure] | ||
| Proof pressure | HG200 / HG201: 0.6MPaG, HC100 / HC101 / HM100 / HM101: 1MPaG | ||
| Ambient Temp. Range | 15 – 50 ℃ [Gas temperature needs to be equal to ambient temperature] | ||
| Internal pressure sensor accuracy (HG200 / HG201) | < ±5kPa [0 – 500kPa (abs)] | ||
| Internal temp. sensor accuracy (HG200 / HG201) | < ±1 ℃ [15 – 50 ℃] | ||
| Control Valve Type (except HM100 / HM101) | Normally-Closed (NC) and Normally-Opened (NO) Piezo Valve | ||
| Materials for external seals | 316L Stainless Steel | ||
| Gas wetted materials | Normally-Closed: 316 Stainless Steel, 316L Stainless Steel, (PCTFE), Co-Ni alloy Normally-Opened: 316 Stainless Steel, 316L Stainless Steel, Co-Ni alloy | ||
| Fittings | 92mm 1.125” Cseal, 92mm 1.125” Wseal™, 124mm 1/4” VCR™ type | ||
| Surface Finish | Electro-polished (fitting, sensor, base) Ra=0.2μm, machine finish Ra=0.8μm | ||
| Orientation | Any position | ||
| Mass | 1.1kg | ||
| Special functions | Pressure Insensitive function (HG200 / HG201 series) microSD™ card, LCD Display to monitor various parameters (HG200 / HG201 series) | ||
| Signal interface | Analog, Digital (RS485, DeviceNet™, EtherCAT®) | ||
| Connector type | Analog : 9Pin D-sub Digital : RS485, DeviceNet™, EtherCAT® Maintenance : RS485/Φ2.5 3-pole round connector (for all model) | ||
| Input power※1 | Analog : +15VDC ±4% 90mA, -15VDC ±4% 60mA DeviceNet™ : +11VDC 150mA – +25VDC 90mA EtherCAT® : +24VDC ±10% 120mA | ||
| Flow set signal (Analog model, except HM100 / HM101) | 0 – 5VDC / 0 – 100% F.S. input impedance > 1MΩ | ||
| Flow out signal (Analog model) | 0 – 5VDC / 0 – 100% F.S. load impedance > 2kΩ | ||
- ※1. This specification is defined based on our standard test conditions with single MFC. Performance under different conditions may not satisfy this specification, and we do not guarantee this specification under all possible configurations.
- ※2. From 0% to 5%S.P. or greater, ambient temperature is 22°C (Min. 15°C, Max. 32°C)
- ※3. Digital mode, ambient temperature is 22°C±3°C
- ※4. Valve closes if the set point applied is less than 0.5% F.S.
- “SCCM” and “SLM” indicate the gas flow given in mL/min and L/min, at 0°C and 101.3kPa(abs) conditions. F.S.=full scale S.P.=set point
Dimensions
1.125″IGS™ fitting
124mm 1/4″ VCR™ type fitting
HG200 / 201, HC100 / 101, HM100 / 101 series model and suffix codes
| Category | Description | Suffix Codes | |||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|
| Model | Thermal Sensor Type | PI-MFC | HG200 | ||||||||
| HG201 | |||||||||||
| Non-PI-MFC | HC100 | ||||||||||
| HC101 | |||||||||||
| MFM | HM100 | ||||||||||
| HM101 | |||||||||||
| Communication Interface | Analog (9Pin D-sub) | A | |||||||||
| DeviceNet™ | D | ||||||||||
| L Protocol RS485 (9Pin D-sub) | L | ||||||||||
| Aera RS485 (9Pin D-sub) | R | ||||||||||
| EtherCAT® | E | ||||||||||
| Communication Connector Location | (Top, except L Protocol RS485 model) | T | |||||||||
| Inlet side(except EtherCAT® model) | U | ||||||||||
| External Seals | Metal seal | M | |||||||||
| Valve Type | Normally-closed | C | |||||||||
| Normally-open | O | ||||||||||
| Fitting | 92mm 1.125″ Wseal™ | BW1 | |||||||||
| 92mm 1.125″ Cseal | BA1 | ||||||||||
| 124mm 1/4″ VCR™ type | 4V2 | ||||||||||
| Fixed Code | 1 | ||||||||||
| Optional Code | No option | NNN | |||||||||
| Metal poppet | ANN | ||||||||||
| Full Scale Range | 10 to 30 SCCM | Multi-1 | |||||||||
| 31 to 100 SCCM | Multi-2 | ||||||||||
| 101 to 300 SCCM | Multi-3 | ||||||||||
| 301 to 1,000 SCCM | Multi-4 | ||||||||||
| 1,001 to 3,000 SCCM | Multi-5 | ||||||||||
| 3,001 to 5,000 SCCM | Multi-6 | ||||||||||
| 5,001 to 10,000 SCCM | Multi-7 | ||||||||||
| 10,001 to 30,000 SCCM | Multi-8 | ||||||||||
| 30,001 to 50,000 SCCM | Multi-9 | ||||||||||
| Example | HG200DTMCBA11NN Multi-5 | ||||||||||
| Thermal type PI-MFC, DeviceNet™, Top Connector, Metal seals, Normally-Closed Piezo valve, 1.125″ 92mm Cseal fitting, No option, Full Scale 3000SCCM | |||||||||||
Related Products
-
Kuwana Metals Aera Transformer Digital Mass Flow Products
-
Kuwana Metals W Series Chilled Tower
-
Kuwana Metals S-A075M Chilled Tower
-
Kuwana Metals SAM 1480G / 2480G Series Mass Flow Controller
-
Kuwana Metals Aera FC-R7800 Series Mass Flow Controller
-
Kuwana Metals SAM PS200 Series Pressure-Based PI Mass Flow Controller
