Manufacturer: Kuwana Metals, Ltd.
Model : Aera Transformer

Features

• Multi-gas, multi-range selection
• Fast response
• All-metal seals
• Field programmable*
• Device Net^TM, RS-485, or analog control
• Multiple alarm and diagnostic capabilities
• RoHS compliant

Benefits

• Outstanding accuracy, repeatability, and stability
• Superior reliability
• Comprehensive communication and control
• Easy integration
• Substantial cost savings
• World-class service and support

Specifications

Operational	780X/785X Series	781X/786X Series	782X Series
Full-Scale Range (N2 Equivalent)	Single-gas models—10 sccm to 5 slm	Single-gas models—5 to 50 slm	Single-gas models—5 to 50 slm
	Multi-gas model (1)—10 to 30 sccm	Multi-gas model (7)—5001 to 10, 000 sccm	─
	Multi-gas model (2)—31 to 100 sccm	Multi-gas model (8)—10,001 to 30,000 sccm	─
	Multi-gas model (3)—101 to 300 sccm	─	─
	Multi-gas model (4)—301 to 1000 sccm	─	─
	Multi-gas model (5)—1001 to 3000 sccm	─	─
	Multi-gas model (6)—3001 to 5000 sccm	─	─
Accuracy	≤ ±1% of set point (25 to 100% of full scale) ≤ ±0.25% of full scale (2 to 25% of full scale)		≤ ±2.0% of full scale
Settling Time	≤ 1.0 s typical per SEMI E17-91 (above 10% of full scale)		≤ 4.0 s
Linearity	≤ ±0.5% of full scale		≤ ±1.0% of full scale
Repeatability	≤ ±0.2% of full scale
Leak Integrity	1×10^-11 Pam3/s (He) max
Control Range	2 to 100% of full scale
Differential Pressure	7 to 40 psiD (49 to 275 kPaD)		21 to 40 psiD (147 to 275 kPaD)
Max Operating Pressure	70 psiG (490 kPaG)
Proof Pressure	140 psiG (981 kPaG)
Temperature	15 to 50°C
Alarm/Diagnostics	Flow, valve voltage, auto-zero adjustment, communications, and microprocessor errors

Physical	780X/785X Series	781X/786X Series	782X Series
Control Valve Type	Normally-closed or normally-open solenoid
Seals	Metal
Materials	316LSS, 316SS, PTFE, KM45
Standard Fittings	1/4″ VCR^TM compatible; 1.5”/1.125” IGS bottom/surface mount (c-seal or Wseal^TM)		3/8” VCR^TM compatible; IGS bottom/ surface mount (c-seal or Wseal^TM)
Surface Finish	Electropolished and ultra-cleaned to ≤ 5 Ra
Attitude Sensitivity	May be mounted in any position
Weight	1.0 kg (1/4” VCR^TM compatible)		2.8 kg (3/8” VCR^TM compatible)

Electrical	780X/785X Series	781X/786X Series	782X Series
Connection Type	9-pin D or DeviceNet^TM
Input Power	+15 VDC ±2% at ≤ 140 mA, -15 VDC ±2% at ≤ 240 mA
	DeviceNet^TM: +11 VDC at 550 mA, +24 VDC at 225 mA
Power Consumption	4.5 W max		4.8 W max
Input Signal	Analog mode: 0 to 5 VDC (input impedance > 1 MΩ)
	Digital mode: 0 to 100%
	DeviceNet^TM: ODVA (125 K, 250 K, 500 Kbps)
Output Indication	Analog mode: 0 to 5 VDC (input impedance > 2 kΩ)
	Digital mode: 0 to 100%
	DeviceNet^TM: ODVA (125 K, 250 K, 500 Kbps)
Digital/Service Communications	EIA standard, RS-485, two-wire, half-duplex, multi-drop with one RJ-11 connector (DeviceNet® models) or two RJ-11 connectors (9-pin D models)

• Note: For full model and suffix code information, see Model and Suffix Codes on next page. Specifications are subject to change without notice.

Model and Suffix Codes

■ Mass Flow Controllers

Category	Description	Suffix Codes
Product Type	Mass flow controller	FC-	…	…	…	…	…	…	…	…
Connector Type	DeviceNet™	…	DN	…	…	…	…	…	…	…
	9-pin D	…	PA	…	…	…	…	…	…	…
RoHS Compliance	Compliant with RoHS directives	…	…	R	…	…	…	…	…	…
Full-Scale Flow Range※1	10 sccm to 5 slm	…	…	…	780	…	…	…	…	…
		…	…	…	7800	…	…	…	…	…
		…	…	…	785	…	…	…	…	…
		…	…	…	7850	…	…	…	…	…
	5 to 50 slm	…	…	…	781	…	…	…	…	…
		…	…	…	7810	…	…	…	…	…
		…	…	…	786	…	…	…	…	…
		…	…	…	7860	…	…	…	…	…
	50 to 200 slm	…	…	…	782	…	…	…	…	…
		…	…	…	7820	…	…	…	…	…
Control Valve	Normally-closed	…	…	…	…	C	…	…	…	…
	Normally-open	…	…	…	…	…	…	…	…	…
Connector※2	Top mounted connector	…	…	…	…	…	T	…	…	…
	Side mounted pigtail connector	…	…	…	…	…	Y	…	…	…
Fittings	1/4” VCR™ compatible	…	…	…	…	…	…	4V	…	…
	3/8″ VCR™ compatible (782x Series only)	…	…	…	…	…	…	6V	…	…
	1.125” c-seal	…	…	…	…	…	…	BA	…	…
	1.125” Wseal™	…	…	…	…	…	…	BW	…	…
	1.5” c-seal	…	…	…	…	…	…	BM	…	…
	1.5” Wseal™	…	…	…	…	…	…	BF	…	…
Gas	Type of gas	…	…	…	…	…	…	…	N2	…
Flow	Flow range of gas (sccm or slm)	…	…	…	…	…	…	…	…	…
Single-Gas Example		FC-	PA	R	7800	C		4V	N2	200
(MFC with 9-pin D connector, RoHS compliant, normally-closed valve, 1/4” VCR^TM compatible fittings, N2 gas, 200 sccm full-scale range)
Multi-Gas/Multi-Range	Configuration for MGMR functioning (see Full-Scale Ranges above for details for multi-gas models 1 through 8)	…	…	…	…	…	…	…	…	Multi -1 to -8 (10 sccm to 30 slm)
										N2 equivalent
Multi-Gas Example		FC-	PA	R	7800	C		4V	MULTI – 3
(MFC with 9-pin D connector, RoHS compliant, normally-closed valve, 1/4” VCR^TM compatible fittings, 101 to 300 sccm full-scale range)

• ※1 Three-digit flow range suffix codes are for DN Series models; Three-digit and four-digit flow range suffix codes are for available for PA Series models. Consult factory for details.
• ※2 Electronic options “T” and “Y” are available only for compact 785 and 786 Series.

■ Mass Flow Meters

Category	Description	Suffix Codes
Product Type	Mass flow meter	FM-	…	…	…	…	…	…	…
Connector Type	DeviceNet™	…	DN	…	…	…	…	…	…
	9-pin D	…	PA	…	…	…	…	…	…
RoHS Compliance	Compliant with RoHS directives	…	…	R	…	…	…	…	…
Full-Scale Flow Range※1	10 sccm to 5 slm	…	…	…	860	…	…	…	…
		…	…	…	8600	…	…	…	…
		…	…	…	865	…	…	…	…
		…	…	…	8650	…	…	…	…
	5 to 50 slm	…	…	…	861	…	…	…	…
		…	…	…	8610	…	…	…	…
		…	…	…	866	…	…	…	…
		…	…	…	8660	…	…	…	…
	50 to 400 slm	…	…	…	862	…	…	…	…
		…	…	…	8620	…	…	…	…
Connector※2	Top mounted connector	…	…	…	…	T	…	…	…
	Side mounted pigtail connector	…	…	…	…	Y	…	…	…
Fittings	1/4” VCR™ compatible	…	…	…	…	…	4V	…	…
	3/8″ VCR™ compatible (862x Series only)	…	…	…	…	…	6V	…	…
	1.125” c-seal	…	…	…	…	…	BA	…	…
	1.125” Wseal™	…	…	…	…	…	BW	…	…
	1.5” c-seal	…	…	…	…	…	BM	…	…
	1.5” Wseal™	…	…	…	…	…	BF	…	…
Gas	Type of gas	…	…	…	…	…	…	N2	…
Flow	Flow range of gas (sccm or slm)	…	…	…	…	…	…	…	…
Example		FM-	PA	R	8600	T	4V	N2	200
(MFM with 9-pin D connector, RoHS compliant, top-mounted connector, 1/4” VCR^TM compatible fittings, N2 gas, 200 sccm full-scale range)

• ※1 Three-digit flow range suffix codes are for DN Series models; Three-digit and four-digit flow range suffix codes are for available for PA Series models. Consult factory for details.
• ※2 Electronic options “T” and “Y” are available only for compact 865 and 866 Series.

Electrical Connections

9-Pin D
1	VALVE OPEN/CLOSE*
2	OUTPUT (0 TO 5 VDC)
3	POWER +15 VDC
4	POWER COMMON (VALVE RETURN)
5	-15 VDC
6	CONTROL (0 TO 5 VDC)
7	SIGNAL COMMON
8	SIGNAL COMMON
9	9 VALVE TEST POINT (0 TO +4 VDC)

DeviceNet^TM
1	DRAIN
2	V+
3	V
4	CAN_H
5	CAN_L

Dimensions

■ Models with VCR^TM Compatible Fittings

	780x, 781x, 860x, 861x Series	785x, 786x, 865x, 866x Series	782x Series
A	12.7 mm (0.5”)	12.7 mm (0.5”)	15.0 mm (0.6”)
B	83.0 mm (3.3”)	65.0 mm (2.6”)	115 mm (4.5”)
C	124.0 mm (4.9”)	106.0 mm (4.2”)	192.3 mm (7.8”)
D	18.0 mm (0.7”)	16.3 mm (0.6”)	25.5 mm (1.0”)
E	69.0 mm (2.7”)	29.0 mm (1.1”)	90.0 mm (3.5”)
F	127.0 mm (5.0”)	127.0 mm (5.0”)	150.0 mm (5.9”)
G	132.0 mm (5.2”)	132.0 mm (5.2”)	154.0 mm (6.1”)
H	28.6 mm (1.1”)	30.2 mm (1.2”)	38.0 mm (1.5”)
I	7.0 mm (0.3”)	16.0 mm (0.6”)	24.4 mm (0.96”)

■ Models with IGS^TM Compatible Fittings

	780x, 781x, 860x, 861x Series		785x, 786x, 865x, 866x Series
	1.125” IGS^TM Fittings	1.5” IGS^TM Fittings</strong	1.125” IGS^TM Fittings	s 1.5” IGS^TM Fittings</strong
A	70.4 mm (2.8”)	70.4 mm (2.8”)	70.4 mm (2.8”)	70.4 mm (2.8”)
B	127.0 mm (5.0”)	127.0 mm (5.0”)	127.0 mm (5.0”)	127.0 mm (5.0”)
C	25.4 mm (1.0”)	25.4 mm (1.0”)	25.4 mm (1.0”)	25.4 mm (1.0”)
D	105.0 mm (4.1”)	105.0 mm (4.1”)	92.8 mm (3.6”)	92.8 mm (3.6”)
E	28.6 mm (1.1”)	38.1 mm (1.5”)	28.6 mm (1.1”)	28.6 mm (1.1”)
F	21.8 mm (0.9”)	30.0 mm (1.2”)	21.8 mm (0.9”)	30.0 mm (1.2”)
G	92.0 mm (3.6”)	92.0 mm (3.6”)	79.8 mm (3.2”)	79.8 mm (3.2”)