Kuwana Metals SAM SFC1480FX / SFC2480FX Series Mass Flow Controller

Manufacturer: Kuwana Metals, Ltd.
Model : SAM SFC1480FX / SFC2480FX Series

SFC1480FX / SFC2480FX series

For both the 1.5″ and 1.125″IGS™, MG/MR Mass Flow Controllers

Dimensions

Item			*Specifications 1**
Model name			SFC1480FX SFC2480FX	SFC1481FX SFC2481FX	SFC1482FX SFC2482FX	SFC1483FX SFC2483FX
Standard full scale flow rate (N2 equivalent)			2SCCM ~5,500SCCM	~11SLM	~30SLM	~50SLM
Function			Multi-gas/multi-range
Valve operation			Normally closed / normally open
Flow rate control range			2~100% F.S.
Operation pressure *2	Inlet pressure		0.05~0.3 MPa (G) 7.3~43.5 PSI (G)		0.1~0.3 MPa (G) 14.5~43.5 PSI (G)	0.2~0.3 MPa (G) 29.0~43.5 PSI (G)
Operation pressure *2	Outlet pressure		Vacuum to ambient pressure
Proof pressure			1.0 MPa (G) 145 PSI (G)
Temperature	Operation		5~50 ºC
	Accuracy guaranteed		15~35 ºC
	Heating temperature when not powered		65ºC maximum
Humidity			35~80%RH (non condensing)
Installation position			Horizontal, Vertical	Horizontal, Vertical (option)
Accuracy	N2 gas	10~100%	± (0.5% S.P. + 0.15% F.S.)
	N2 gas	2~10%	±0.2% F.S.
	Actual gas	10~100%	± (1.5% S.P. + 0.35% F.S.)
	Actual gas	2~10%	±0.5% F.S.
Linearity	N2 gas		±0.3% F.S
Linearity	Actual gas		±1.0% F.S
Repeatability	10~100%		± (0.1% S.P. + 0.05% F.S.)
Repeatability	2~10%		±0.06% F.S.
Flow rate sensor guaranteed zero point deviation range			±0.5% F.S. / year, max.
Temperature dependence		Zero point	±0.01% F.S. / ºC (15~35 ºC)
Temperature dependence		Span	±0.01% S.P. / ºC (15~35 ºC)
Response Time	0% → (20~100%)		Max. 1.0 sec. to reach ±2% S.P of the set value
Response Time	0% → (2~20%)		Max. 1.5 sec. to reach ±0.4% S.P of the set value.
External leakage standard			Max. 1×10^-11 Pa•m³/s (He)
Flow rate setting signal			0.1 to 5 VDC (absolute rating: Max. ±15 VDC)
Flow rate output signal			0 to 5 VDC (maximum output: ±15 VDC)
Required power			+15 VDC ±4%, 140 mA max -15 VDC ±4%, 140 mA max
Material of gas wetted surface	Housing, flange, valve seat		SUS316L
	Diaphragm		Ni-Co alloy
	Flow sensor		SUS316L		Ni
	Seal *3		SUS316L
Surface finish of components that contact the gas			Specially electro-polished (standard)
Fitting			Wseal™, Cseal, 1/4” UJR male

*1: The specifications above are guaranteed values when the MFC was measured by itself in standard conditions. The MFC may not meet the specifications above, depending on the
measurement conditions.
*2: The SFC147*FX/SFC247*FX are also available for use with minute pressure differences. Please inquire separately for the specifications of our minute pressure difference models.
*3: A model using a rubber seal is also available. Please inquire separately about the rubber seal specifications.

SFC1480FX-D / SFC2480FX-D series

DeviceNet™ communication type For both the 1.5″ and 1.125″IGSTM MG/MR Mass Flow Controllers

Dimensions

Item			*Specifications 1**
Model name			SFC1480FX-D SFC2480FX-D	SFC1481FX-D SFC2481FX-D	SFC1482FX-D SFC2482FX-D	SFC1483FX-D SFC2483FX-D
Standard full scale flow rate (N2 equivalent)			2SCCM ~5,500SCCM	~11SLM	~30SLM	~50SLM
Function			Multi-gas/multi-range
Valve operation			Normally closed / normally open
Flow rate control range			2~100% F.S.
Operation pressure *2	Inlet pressure		0.05~0.3 MPa (G) 7.3~43.5 PSI (G)		0.1~0.3 MPa (G) 14.5~43.5 PSI (G)	0.2~0.3 MPa (G) 29.0~43.5 PSI (G)
Operation pressure *2	Outlet pressure		Vacuum to ambient pressure
Proof pressure			1.0 MPa (G) 145 PSI (G)
Temperature	Operation		5~50 ºC
	Accuracy guaranteed		15~35 ºC
	Heating temperature when not powered		65ºC maximum
Humidity			35~80%RH (non condensing)
Installation position			Horizontal, Vertical	Horizontal, Vertical (option)
Accuracy	N2 gas	10~100%	± (0.5% S.P. + 0.15% F.S.)
	N2 gas	2~10%	±0.2% F.S.
	Actual gas	10~100%	± (1.5% S.P. + 0.35% F.S.)
	Actual gas	2~10%	±0.5% F.S.
Linearity	N2 gas		±0.3% F.S
Linearity	Actual gas		±1.0% F.S
Repeatability	10~100%		± (0.1% S.P. + 0.05% F.S.)
Repeatability	2~10%		±0.06% F.S.
Flow rate sensor guaranteed zero point deviation range			±0.5% F.S. / year, max.
Temperature dependence		Zero point	±0.01% F.S. / ºC (15~35 ºC)
Temperature dependence		Span	±0.01% S.P. / ºC (15~35 ºC)
Response Time	0% → (20~100%)		Max. 1.0 sec. to reach ±2% S.P of the set value
Response Time	0% → (2~20%)		Max. 1.5 sec. to reach ±0.4% S.P of the set value.
External leakage standard			Max. 1×10^-11 Pa•m³/s (He)
Flow rate setting signal			DeviceNet™ communication *3
Flow rate output signal			DeviceNet™ communication *3
Required power			+24 VDC, 0.3 A max
Material of gas wetted surface	Housing, flange, valve seat		SUS316L
	Diaphragm		Ni-Co alloy
	Flow sensor		SUS316L		Ni
	Seal *3		SUS316L
Surface finish of components that contact the gas			Specially electro-polished (standard)
Fitting			Wseal™, Cseal, 1/4” UJR male

*1: The specifications above are guaranteed values when the MFC was measured by itself in standard conditions. The MFC may not meet the specifications above, depending on the
measurement conditions.
*2: The SFC147*FX/SFC247*FX are also available for use with minute pressure differences. Please inquire separately for the specifications of our minute pressure difference models.
*3: For information about DeviceNet™ communication, see page 6.
*4: A model using a rubber seal is also available. Please inquire separately about the rubber seal specifications