Manufacturer: Musashi Engineering, Inc.
Model: FAD5100S-WH

Features

・High-speed coating with non-stop continuous operation
・High-speed alignment with non-stop continuous operation:
・Automate management of coating amount: DVM function
・Form ideal coating pattern “leaf line” to avoid voids: MCD function [PAT.P]
・Prevent mass defects before they occur: AFC function
・Equipped with wafer mapping function
・Fully automated production possible when connected to EFEM・
Compatible with wafers and FOUPs
・Wafer mapping function
・Result remapping (compatible with SECSGEM) *Optional

Specifications