Manufacturer: Musashi Engineering, Inc.
Model: FAD5700- WH

Features

・Compatible with cutting-edge semiconductor processes (WLP/chiplet/heterogeneous chip integration)
・Can be applied to the industry’s highest level of KOZ
・Fully automated production possible when connected to EFEM
– Equipped with multi-head independent control and automatic coating weight correction function.
– Latest UI that contributes to labor saving
・High-speed alignment with non-stop continuous operation:
・Height measurement with non-stop continuous operation:
・Automate management of application amount: DVM function
・Prevent mass defects: AFC function
・Compatible with wafers and FOUPs
・Wafer mapping function
・Result remapping (SECSGEM compatible)

Specifications