Features

Energy saving with no compressor (refrigeration unit)
For cooling, 7℃ cold water for air conditioning is used.
*Please prepare cooling water (primary side) as a utility.

No fluorocarbons
Not subject to the Fluorocarbon Emissions Reduction Act
Does not use any fluorocarbon refrigerants
Inverter-driven high-pressure pump
Safe because it has the same capacity even in areas with different frequencies!

Applications

Engineering laser equipment cooling
X-ray tubes
Equipment cooling in clean rooms (using cooling equipment installed in the room)
Semiconductor manufacturing process