NISSAN TANAKA Flowmeter, Purge Valve Analytical Pressure Regulators

Manufacturer: Nissan Tanaka

S/LABO Flowmeter

SUS-made flowmeter

Bs-made flowmeter

Features

This flowmeter has been developed and designed for use with S-LABO.
It is assembled in a cleanroom environment, ensuring excellent gas purity.
Fluorine-based grease, known for its purity retention, has been used for the valve.
Optional helium leak testing is available (1.3×10^-7Pa·m3/h or below).

Specifications

Gas Inlet Metal		Inlet and Outlet Shape		Seal, Gasket Material	Tapered Pipe ・Outer Casing Material
Type	Material Composition	Inlet Side	Outlet Side※	Seal, Gasket Material	Tapered Pipe ・Outer Casing Material
Brass	C3604	NPT1/4 male	M16×1.5 right male or left male	Neoprene Rubber, Polyethylene	Polycarbonate
Stainless steel	SUS316	NPT1/4 male	M16×1.5 right male or left male	Viton Rubber, Fluororesin	Glass

Product lineup

Gas (※1)	Set Flow Rate L/min(nor)	Set Pressure (MPa)	Model Number (※1)		Outlet thread
Gas (※1)	Set Flow Rate L/min(nor)	Set Pressure (MPa)	Brass	Stainless Steel	Outlet thread
Argon	0.05～0.5(※2)	0.1	–	F80	Right
	0.1～1	0.1	F61	F81
	0.5～5	0.1	F62	F82
	1.5～15	0.2	F63	–
	2.5～25	0.2	F64	–
Ammonia	0.05～0.5(※2)	0.1	–	F83	Right
	0.1～1	0.1	–	F84
	0.5～5	0.1	–	F85
Oxygen	1～10	0.1	F65	–	Right
Oxygen	2.5～25	0.2	F66	–	Right
Hydrogen	0.1～1	0.1	F67	F86	Left
	0.5～5	0.1	F68	F87
	1～10	0.1	F69	F88
	2.5～25	0.1	F70	–
Nitrogen	0.05～0.5(※2)	0.1	–	F89	Right
	0.1～1	0.1	F71	F90
	0.5～5	0.1	F72	F91
	1～10	0.1	F73	–
	2.5～25	0.2	F74	–
Sulfur dioxide	0.05～0.5(※2)	0.1	–	F92	Right
	0.1～1	0.1	–	F93
	0.5～5	0.1	–	F94
Helium	0.3～3	0.1	F76	F95	Right
Helium	1～10	0.1	F77	F96	Right
Hydrogen sulfide	0.1～1	0.1	–	F97	Left
Hydrogen sulfide	0.5～5	0.1	–	F98	Left

※1) Please inquire about products other than the gases and model numbers specified above.
※2) The flow rates displayed on the product are in the range of 50 to 500 mL/min (normal).

S/LABO Purge Valve

Features

This purge valve has been developed and designed for use with S-LABO.
It is assembled in a cleanroom environment, ensuring excellent gas purity.
Fluorine-based grease, known for its purity retention, has been used for the valve.
It purges hazardous gases within the pressure regulator and piping, reducing the risk during container replacement.
An integrated check valve at the purge gas inlet prevents the backflow of hazardous gases even if the valve has been left open.
Optional helium leak testing is available (1.3×10^-7Pa·m3/h or below).

Product lineup

Model	Main Component Material	Inlet Shape	Outlet Shape	Purge Gas Inlet Shape	Applicable Gases	Common Specifications
P30	SUS316	W22-14 right female socket	W22-14 right male socket	M16×1.5 right male	Gases other than those listed below	Maximum Operating Pressure 15MPa Purge Gas Pressure 0.5～1MPa Operating Temperature -5～40°C
P31	SUS316	W22-14 left female socket	W22-14 left male socket
P32	SUS316	W26-14 right female socket	W26-14 right male socket
P39	SUS316	W22-14 right female socket	W22-14 right male socket	M16×1.5 right male	Ammonia
P31E	SUS316	CGA350 female	CGA350 male	M16×1.5 right male	Helium
P31AH	SUS316	20.9-14 left female	20.9-14 left male	M16×1.5 right male	Helium
P60	NCu	W22-14 right female socket	W22-14 right male socket	M16×1.5 right male	Highly corrosive gas
P62	NCu	W26-14 right female socket	W26-14 right male socket	M16×1.5 right male	Highly corrosive gas