Japan, Nissan Tanaka, Optical Product
NISSAN TANAKA Pressure Gauge For Semiconductor Use
Manufacturer: Nissan Tanaka
Features
- Manufactured under severe quality control and clean room.
- Tested all numbers by He-leak testing
- Model to use Ni-Cr-Mo alloy for contact with media is also available for corrosive gas.
Specification
| Model | Pressure Gauge | ||
|---|---|---|---|
| Material | Case | SUS304 | |
| Contact with media (Bourdon tube, stem) | SUS316L | ||
| Others | SUS304, A1070P | ||
| Connection | 9/16-18UNF | NPT1/4 | |
| Leakage (He leak) Less Pa・m3/sec | 1.3×10-11 | 1.3×10-9 | |
| Surface finish | Non-EP
or Ra 0.25 µm |
Non-EP | |
| Accuracy | JIS 1.6 class (JIS B7505) | ||
| Using temperature | -5 – 40℃ | ||
Option
- Materials in contact with media : Ni-Cr-Mo alloy
- *Surface finish : Ra 0.25μm only
Features
- Assembled in clean room.
- Suitable for electro material gases
- Usable for corrosive gases because material in contact with medial is SUS316L.
- Various models to satisfy customer’s requirement
- Tested all numbers by He-leak under severe quality control.
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