Manufacturer: Nissan Tanaka
Model: S-TORR V 02

For inlet low-pressure, small model: S-TORR V 02

Features

The S-TORR regulator is a high-purity gas pressure regulator developed based on the highly reliable TORR regulator used in semiconductor process gas lines.

By eliminating screw structures in the gas contact section and applying electrolytic polishing as standard, it achieves very high moisture displacement characteristics and particle reduction.

The body is welded to the fittings, and the external seal of the diaphragm section uses a metal seal structure. This ensures high external seal integrity, allowing for safe use even with particularly high-purity gases.

Includes a helium leak test among the full range of shipping inspections.

The STⅤ02 series is a very small pressure regulator with a body diameter of Ø35 and a standard face-to-face length of 70.5mm.

Allows for the design of small outlet panels, suitable for integration into equipment.

For corrosive gases, the SH series is available, which uses a high corrosion-resistant Ni-Cr-Mo alloy for the main metal parts in contact with the gas.

Basic Specifications

Use materials
Gas connection part
Main body: SUS316L
Diaphragm: Ni-Cr-Mo alloy
Joint or fitting: SUS316L
Other gas contact parts: SUS316L, SUS316, Fluororesin/ Ni-Cr-Mo alloy, SUS316L, Fluororesin （STⅤ02SH）
Non-contact gas part
Cap: C3604
Pressure regulating handle: ABS plastic, C3604

Performance
Inlet side maximum working pressure: 1.0MPa
Outlet side maximum working pressure: 0.7MPa
Maximum flow rate: 110L/min(nor)（P1=1.0MPa, P2=0.7MPa, N₂ GAS）
Operating temperature: -5～40℃
Weight: 390g (2 ports); ※This product will be made as a 2-port product only.
Surface roughness of connected gas metal parts: Ra0.25μm (optional： Ra0.1μm）
Diameter of inlet and outlet ports: 1/4″
External leak amount: 1.3×10^-11Pa・m3/sec below

Flow Characteristics Diagram

Appearance

Description

Designated Attention

※1 In the case of other types of fittings, different symbols are used.
※2 In the case of other shapes, different symbols are used.
※3 This is an example of additional specifications. For face-to-face dimensions or other special arrangements, different symbols or numbers will be used. For more details, please inquire.
※4 For STⅤ02, the nozzle material will be PCTFE for any gas.

⚠️Warning: For correct usage, please make sure to read the ‘Instruction Manual’ carefully before use.

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