NISSAN TANAKA S-TORR V 30 Pressure Regulator For Semiconductors

Manufacturer: Nissan Tanaka
Model: S-TORR V 30

For inlet low-pressure, standard model: S-TORRⅤ30 / 30SH

Features

The S-TORR regulator is a high-purity gas pressure regulator developed based on the highly trusted TORR regulator used in semiconductor process gas lines.
By eliminating the screw structure of the gas contact part and applying standard electropolishing, it achieves very high moisture displacement characteristics and reduces particles.
The body and fittings are connected by welding, and the external seal of the diaphragm part employs a metal seal structure. Due to its high external sealability, it can be used with confidence, especially with high-purity gases.
It incorporates a filter in the flow path of the primary chamber, reducing internal leaks.
Including helium leak tests, all products undergo thorough shipment inspections.
The STⅤ30 series is a standard model for low-pressure primaries and is widely used in low-pressure piping, outlet panels, and cylinder cabinets of gases with low filling pressure.
For corrosive gases, we offer the SH series using Ni-Cr-Mo alloy, a material with high corrosion resistance for the main metal parts in contact with the gas.

Basic Specifications

Use materials
Gas connection part
Main body: SUS316L
Diaphragm: SUS316L / Ni-Cr-Mo alloy （STⅤ30SH）
Filter: SUS316L / Ni-Cr-Mo alloy （STⅤ30SH）
Pressure Gauge: SUS316L
Joint or fitting: SUS316L
Other gas contact parts: SUS316L, SUS316, Fluororesin/ Ni-Cr-Mo alloy, SUS316L, Fluororesin （STⅤ30SH）
Non-contact gas part
Cap: C6782
Pressure regulating handle: ABS plastic, C3604

Performance
Inlet side maximum working pressure: 1.5MPa
Outlet side maximum working pressure: 0.6MPa
Maximum flow rate: 85L/min(nor)（P1=0.7MPa, P2=0.6MPa, N₂ GAS）
Operating temperature: -5～40℃
Weight: 1.2kg (2 ports), 1.4kg (3 ports)
Built-in filter filtration degree: 10μm
Surface roughness of connected gas metal parts: Ra0.25μm (optional： Ra0.1μm）
Diameter of inlet and outlet ports: 1/4″
External leak amount: 1.3×10^-11Pa・m3/sec below

Flow Characteristics Diagram

Appearance

Description

Designated Attention

※1 If you choose the 4-port specification, please select the symbol for the primary-side pressure gauge from the options below and replace it with the product name assembly “30X”

Primary Side Pressure Gauge Symbol (Maximum Operating Pressure)	03G：-0.1～0.3MPa（0.2MPa)	30G：-0.1～3.0MPa（１.5MPa)
	06G：-0.1～0.6MPa（0.4MPa)	30F： Instrumentation without a pressure gauge, with a port and a fitting cap (1.5MPa)
	10G：-0.1～1.0MPa（0.6MPa)	30B： Instrumentation without a pressure gauge, with a port and a fitting plug (1.5MPa)
	15G：-0.1～1.5MPa（1.0MPa)

※2 In the case of not having a secondary pressure gauge, the symbols for each operating

Operating Pressure	Symbol
～0.2MPa	03
～0.4MPa	06
～0.6MPa	10

※3 In the case of 2 ports, please select “X.” “X” refers to a product without a pressure gauge (unprocessed port). If you have only fittings without a pressure gauge and want to protect the fitting with a resin cap, select “F.” If you want to secure it with a metal plug, select “B.”
※4 In the case of other types of joints, different symbols are used.
※5 In the case of other shapes, different symbols will be used.
※6 We have selected the optimal resin for each type of gas used in the gas connection part (nozzle).
※7 This is an example of additional specifications. In the case of specifying interfacial dimensions or other special requirements, different symbols or numbers will be used. Please inquire for more details.