Japan, Nissan Tanaka, Optical Product
NISSAN TANAKA TE-140 series, TE-140A Vacuum Generator For Semiconductor Use
Manufacturer: Nissan Tanaka
Models: TE-140 series, TE-140A
Features
- Equipment to get vacuum by continuous supplying Nitrogen or Air
- It is used as generator of vacuum in purging used remain gas or atmosphere inside piping.
Construction
- Body integrated vacuum generating function
- Supplying connection of working gases
- Discharged connection
- Vacuum connection
Specification
| Model | TE-140 series | TE-140A | |
|---|---|---|---|
| Supplying pressure of working gases | 0.5MPa | ||
| Flowrate | around 30L/min(nor) | ||
| Achieved vaccum | Less – 76KPa(18cmHg) | ||
| Connection | In | 4/6″VCR or UJR | 4/6 VCR |
| Blow | 3/8″VCR or UJR | 3/8 VCR | |
| Vaccum | 4/6″VCR or UJR | 4/6 VCR | |
| Material | SUS316 | ||
| Leakage (He leak) | Less 1.3×10 – 10Pa・m3/sec | ||
How to use
- Connect each connection. In case that vacuumed gas is dangerous, the safety device for discharging the gas is required.
- Supply the working gas to supplying connection
- Start absorbing from the vacuum connection and get vacuum in connecting piping or device.
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