NISSAN TANAKA TORR-2800, TORR-2800SH Pressure Regulator For Semiconductors

Manufacturer: Nissan Tanaka
Model: TORR-2800, TORR-2800SH

Features

The TORR series is a pressure regulator for semiconductor gases that has earned high trust through a long track record. It is a pressure regulator that can be called a synonym.
All assembly is done in a 0.3μm class 1000 clean room.
A filter is built into the flow path of the primary chamber to reduce internal leaks.
All products undergo shipping inspection, including He leak test.
TORR-2800 series is a regulator for supplying corrosive and liquefied gases at large flow rates.

Specifications

Materials Used

Contact Gas Parts
Main Body : SUS316L
Diaphragm: Ni-Cr-Mo Alloy
Pressure Gauge: SUS316L
Joint: SUS316L
Filter: SUS316 / Ni-Cr-Mo Alloy (SH Series)
Other Contact Gas Parts: SUS316L, SUS316, Fluororesin / Ni-Cr-Mo Alloy, SUS316, Fluororesin (SH Series)
Non-Contact Gas Parts:
Cap: C3604
Pressure Adjustment Handle: ABS Resin, C3604

Performance

Maximum Inlet Pressure: 15MPa
Maximum Outlet Pressure: 1.0MPa
Maximum Flow Rate: 1,000L/min (nor) (P1=4.5MPa, P2=0.4MPa, N2 GAS)
Operating Temperature:-5°C to 40°C
Weight: 6.7kg
Internal Filter Filtration Level: 20μm / 10μm (SH Series)
Inlet/Outlet Port Size: 1/2″
External Leak Rate: 1.3×10⁻⁶Pa·m³/sec or less

Flow Rate Characteristics Chart

TORR-2800, TORR-2800SH

Appearance

Description

Selection Caution

※ 1: If there is no primary side pressure gauge, the symbol for each operating pressure is as follows.

Working pressureSymbol
~1.0MPa15
  ~15MPa B5

※2: If there is no secondary side pressure gauge, the symbol for each operating pressure is as follows.

Working pressureSymbol
~0.2MPa3
 ~0.6MPa10
~0.4MPa6
  ~1.0MPa15

※ 3: For other special specifications, a different symbol will be used.

⚠️Warning: In order to use the product correctly, please read the “Instruction Manual” carefully before use.


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