NISSAN TANAKA TORR-3300 Series Pressure Regulator For Semiconductors

Manufacturer: Nissan Tanaka
Model: TORR-3300 Series

Features

The TORR series is a pressure regulator that has earned high reliability through its long history and can be considered the ‘icon’ of pressure regulators for semiconductor gases.
All units undergo shipping inspections, including a helium leak test.
The TORR-3300 Series is a high-flow model for primary high-pressure applications. It can supply a maximum of 220m³/h (nor).
The device does not include an integrated filter; please install a filter in the piping.

Specifications

Materials Used:

Contact Gas Parts
Main Body: SUS316
Diaphragm: Chloroprene Rubber (Teflon Cover on the Contact Gas Side)
Pressure Gauge: SUS316L
Joint: SUS316
Other Contact Gas Parts: SUS316L, SUS316, Fluororesin

Non-Contact Gas Parts:
Cap: C3604
Pressure Adjustment Handle: C3604

Performance

Maximum Inlet Pressure: 20MPa
Maximum Outlet Pressure: 1.0MPa
Maximum Flow Rate: 220m³/h (nor) (P1=8MPa, P2=0.6MPa, N2 GAS)
Operating Temperature:-5°C to 40°C
Weight: 14 kg
Internal Filter Filtration Level: The filter is not included; please install separately.
External Leak Rate: 1.3×10⁻⁶Pa·m³/sec or less

Flow Rate Characteristics Chart

TORR-3300 Series

Appearance

Product name structure

The TORR-3300 Series will be custom-made to your specifications. Please contact us regarding the following details.

Gas used
Purpose
Inlet pressure gauge MPa
Inlet pressure gauge MPa
Outlet pressure MPa
Outlet pressure gauge MPa
Usage flow rate m3 /h(nor) (at outlet pressure MPa)
Inlet fitting
Outlet fitting
Other requests

Production example

Product name Primary side pressure gauge Secondary pressure gauge   Inlet joint Outlet joint
TORR-3300BJ 35MPa Gauge 1.5MPa Coupled Gauge 15A Insert Sleeve
TORR-3300AT 35MPa Gauge 1.5MPa Coupled Gauge 20A Insert Sleeve

⚠️Warning: In order to use the product correctly, please be sure to read the “Instruction Manual” carefully before use.


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