Nissan Tanaka
NISSAN TANAKA TORR-80 Pressure Regulator For Semiconductors

Manufacturer: Nissan Tanaka
Model: TORR-80
Low-pressure, standard model for the primary side low-pressure use: TORR-30
Features
- The TORR series, synonymous with “semiconductor gas pressure regulators” due to its long track record, has earned high reliability.
- Technicians perform assembly in a Class 1000 cleanroom to a 0.3μm standard.
- A built-in filter in the primary chamber’s flow path reduces internal leaks.
- We conduct a helium leak test on every unit as part of our comprehensive shipping inspection.
- We can also produce specifications for electrolytic polishing (contact gas metal part surface roughness Ra0.25μm).
- You can use the TORR-80 series as a medium flow model for primary low-pressure applications, suitable for primary pressure reduction of liquefied gases or in piping that requires flow rate control.
Basic Specifications
Use materials
Gas connection part
Main body: SUS316L
Diaphragm: SUS316L
Filter: SUS316L (Welding connections do not include a filter.)
Pressure Gauge: SUS316L
Joint or fitting: SUS316 (Threaded connection), SUS316L (Welding connection)
Other gas contact parts: SUS316L, SUS316, Fluororesin
Non-contact gas part
Cap: C3604
Pressure regulating handle: ABS plastic, C3604
Performance
Inlet side maximum working pressure: 2.0MPa
Outlet side maximum working pressure: 0.6MPa
Maximum flow rate: 1,600L/min(nor)(P1=1.5MPa, P2=0.6MPa, N₂ GAS)
Operating temperature: -5~40℃
Weight: 3.0kg
Built-in filter filtration degree: 20μm (The welding connection specification does not include a filter.)
Diameter of inlet and outlet ports: 1/2″
External leak amount: 1.3×10-8Pa・m3/sec below
Flow Characteristics Diagram

Appearance


Description

Designated Attention
※1 If a 4-port specification is selected, please choose the symbol for the primary side pressure gauge from below and replace it with the number 30 in the product name assembly.
| Primary side pressure gauge symbol | Maximum operating pressure |
|---|---|
| 03 | -0.1~0.3MPa(0.2MPa) |
| 06 | -0.1~0.6MPa(0.4MPa) |
| 10 | -0.1~1.0MPa(0.6MPa) |
| 15 | -0.1~1.5MPa(1.0MPa) |
| 30 | -0.1~3.0MPa(2.0MPa) |
※2 If there is no secondary pressure gauge, the symbols for each operating pressure are as follows:
| Operating Pressure | Symbol |
|---|---|
| ~0.2MPa | 03 |
| ~0.4MPa | 06 |
| ~0.6MPa | 10 |
※3 In the case of other shapes, different symbols are used.
※4 When using slant connectors, the structure is basically a welded connection for structure ②. For other types of connectors, structure ② is essentially a threaded connection.
※5 Only joint types S (SwageLock) and F (FineLock) are available for selection.

⚠️Warning: For correct usage, please make sure to read the ‘Instruction Manual’ carefully before use.
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