Manufacturer: Nissan Tanaka
Model: TORR-L

Low-pressure, micro-pressure model: TORR-L

Features

• The TORR series has earned high trust due to its long track record and is considered synonymous with “pressure regulators for semiconductor gases.”
• We carry out assembly in a class 1000 clean room with all parts meeting 0.3μm specifications.
• We perform helium leak tests and conduct shipment inspections on all items.
• We can also manufacture products with an electrolytic polishing specification (with a surface roughness of Ra0.25μm on the connecting gas metal parts).
• The TORR-L series is a regulator that allows for the control of secondary-side low pressure.

Basic Specifications

Use materials
Gas connection part
Main body: SUS316L
Diaphragm: SUS316L
Pressure Gauge: SUS316L
Other gas contact parts: SUS316L, SUS316, Fluororesin
Non-contact gas part
Cap: C3604
Pressure regulating handle: ABS plastic, C3604

Performance
Inlet side maximum working pressure: 1.5MPa
Outlet side maximum working pressure: 0.06MPa
Maximum flow rate: 40L/min（nor) （P1=0.1MPa, P2=0.06MPa, N₂ GAS）
Operating temperature: -5～40℃
Weight: 5.2 kg
Built-in filter filtration degree: The filter is not included, please install it separately
Diameter of inlet and outlet ports: 3/8″
External leak amount: 1.3×10^-8Pa・m3/sec below

Flow Characteristics Diagram

Appearance

Description

We will custom make the TORR-L series according to your desired specifications. Please provide us with the details below.

Production Example

⚠️Warning: For correct usage, please make sure to read the ‘Instruction Manual’ carefully before use.

Kouei is Distributor/Agent of Nissan Tanaka
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