Osaka Vacuum
Osaka Radiation-Hardened Type TG-MR Series Turbo Molecular Pumps
Manufacturer: Osaka Vacuum, Ltd.
Model: TG-MR Series
Specifications
| Flange | TG390MR | TG420MR | TG900MR | TG1300MR | TG2400MR |
|---|---|---|---|---|---|
| Inlet / Outlet | VG100 / KF25 | VG150 / KF25 | VG150 / KF40 | VG200 / KF40 | Please contact us for details |
| Volume flow rate | |||||
| N₂ (L/s) | 340 | 400 | 900 | 1300 | 2400 |
| N₂ (with protective screen) | 320 | 370 | 860 | 1230 | 2300 |
| H₂ (L/s) | 290 | 300 | 1050 | 1200 | 1100 |
| Max. compression ratio | |||||
| N₂ | 4.5×10³ | 1×10⁶ | 1.5×10⁴ | 1.5×10⁴ | |
| H₂ | |||||
| Base pressure | |||||
| VG・ISO-B・CF (Pa) | <1×10⁻⁶ / <1×10⁻⁷ | <1×10⁻⁶ | |||
| VG・ISO-B・CF (Torr) | <7.5×10⁻⁷ / <7.5×10⁻⁸ | <7.5×10⁻⁷ | |||
| Startup time (min) | 2–3 | 4–5 | |||
| Shutdown time (min) | 4–5 | 4–5 | |||
| Max. backing pressure (Torr / Pa) | 400 (3) | 500 (3.8) | 200 (1.5) | ||
| Recommended backing vacuum pump (L/min) | ≥160 | ≥250 | ≥500 | ||
| Mounting direction | freely | ||||
| Turbo Controller | TC010MA | ||||
