Osaka Vacuum
Osaka ST Series (TG-F series + DSP251) Turbo Molecular Pumps
Manufacturer: Osaka Vacuum, Ltd.
Model: ST Series (TG-F series + DSP251)
Features
- High vacuum exhaust unit.
- Exhaust up to high vacuum with a simple operation.
- Easy to control with touch panel.
- Since it has casters, it can be easily moved to the desired place for use.
- Mounted with a turbo molecular pump from the TG-F series which is resistant to disturbance!
This unit is portable while it is operating. - Optional devices and apparatuses are available to match your needs.
Specifications
| Model | ST220F*D | ST350F*D | ST450F*D | |
| Turbo Molecular Pump | TG220F | TG350F | TG450F | |
| Volume flow rate (N2; L/s) | 220(210) ※1 | 350(330) ※1 | 450(430) ※1 | |
| Base pressure | (Pa) | <1×10-6 | ||
| (Torr) | <7.5×10-9 | |||
| Inlet flange | VG100/CF100/ISO-R100 | VG150/CF160/ ISO-B160 | ||
| Backing pump | Dry vacuum pump; DSP251 230 (200) L/min ※2 | |||
| Cooling system | Air cooling | |||
| Power supply | Single phase, AC100V/AC200V | |||
| Standard equipment configuration |
| |||
※ (1): With protective screen
※ (2): Gas ballast opened
Dimensions
| Model | A | B |
| ST220FVD | VG100 | 680 |
| ST220FRD | ISO-R100 | 680 |
| ST220FCD | CF100 | 700 |
| ST350FVD | VG100 | 710 |
| ST350FRD | ISO-R100 | 694 |
| ST350FCD | CF100 | 710 |
| ST450FVD | VG150 | 670 |
| ST450FBD | ISO-B160 | 670 |
| ST450FCD | CF160 | 670 |
- Reprinting prohibited without permission. Contents are subject to change without notice.
