Osaka Vacuum
Osaka TG1400F Turbo Molecular Pumps
Manufacturer: Osaka Vacuum, Ltd.
Model: TG1400F
Features
- Any orientation
- Compact size
- Energy-saving
- Quick start up
- Quick shut down with gas vent
- Durable structure for air inrush
- Serial communication
※RS232C Serial interface
Specifications
| Inlet flange | VG200 ISO-B200 CF200 | |
| Volume flow rate | N2 (L/s) | 1400 |
| N2 (with protective screen) (L/s) | 1300 | |
| H2 (L/s) | 750 | |
| Max. compression ratio | N2 | 1×108 |
| H2 | 4.3×103 | |
| Base pressure | (Pa) (Torr) | <1×10-6 <7.5×10-9 |
| Max. throughput ※1 | (sccm) | 450 |
| Startup time | (min) | 5.5-7 |
| Shutdown time | (min) | 15-18 |
| Max. backing pressure | (Pa/Torr) | 330/2.5 |
| Recommended backing vacuum pump | (L/min) | ≧250 |
| Position | Any orientation | |
| Weight | VG・ISO-B/CF(kg) | 29/30 |
| Controller | TC1103 | |
- *1: When using a backing vacuum pump of 500L/min.
- [Ambient temperature for use]
- The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.
- [Corresponding gases]
- Some service gases can deteriorate the lubrication grease and internal parts. Contact Osaka Vacuum for a list of applicable gas types.
Dimensions
A B C D VG200 φ300 16 272 CF200 φ253 25 319 ISO-B200 φ285 16 300
- Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
Reprinting prohibited without permission. Contents are subject to change without notice.
