Osaka TG220F Turbo Molecular Pumps

Manufacturer: Osaka Vacuum, Ltd.
Model: TG220F

Features

Inlet flange		VG100 ISO-R100 CF100
Volume flow rate	N₂ (L/s)	220
	N₂(with protective screen) (L/s)	210
	H₂ (L/s)	100
Max. compression ratio	N₂	1×10⁸
Max. compression ratio	H₂	4×10²
Base pressure	(Pa) (Torr)	<1×10^-6<7.5×10^-9
Max. throughput^※1	(sccm)	400
Startup time	(min)	1-1.2
Shutdown time	(min)	2.5-3.5
Max. backing pressure	(Pa/Torr)	260/2
Recommended backing vacuum pump	(L/min)	≧80
Position		Any orientation
Weight	VG・ISO-R/CF(kg)	5.5/8
Controller		TC223

*1 : When using a backing vacuum pump of 160L/min.
[Ambient temperature for use]
The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.
[Corresponding gases]
Some service gases can deteriorate the lubrication grease and internal parts. Contact Osaka Vacuum for a list of applicable gas types.

Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
Reprinting prohibited without permission. Contents are subject to change without notice.

Controller model	TC223
Input Voltage (ACV)	100-110 (±10%) 200-230 (±10%)
Input Frequency (Hz)	50/60
Input Phases	Single
Input Power (VA)	590
Rated Output Frequency (Hz)	800
Weight (kg)	2.7
Standard accessories	-Input connector: 1 -Remote connector: 1 -Serial communication connector: 1 -Manual (Instruction, Serial communication instruction): 1 copy
TMP	TG220F