Osaka Vacuum
Osaka TG350F Turbo Molecular Pumps
Manufacturer: Osaka Vacuum, Ltd.
Model: TG350F
Features
- Any orientation
- Compact size
- Energy-saving
- Quick start up
- Quick shut down with gas vent
- Durable structure for air inrush
- Serial communication
※RS232C Serial interface - Certificated safety standard NRTL / SEMI-S2 / CE
Specifications
| Inlet flange | VG100 ISO-R100 CF100 | |
| Volume flow rate | VG/ISO-R・CF N2 (L/s) | 350/330 |
| VG/ISO-R・CF N2 (with protective screen) (L/s) | 330/310 | |
| VG/ISO-R・CF H2 (L/s) | 210/210 | |
| Max. compression ratio | N2 | 1×108 |
| H2 | 2×103 | |
| Base pressure | (Pa/Torr) | <1×10-6/<7.5×10-9 |
| Max. throughput ※1 | (sccm) | 500 |
| Startup time | (min) | 2-2.5 |
| Shutdown time | (min) | 5-6.5 |
| Max. backing pressure | (Pa/Torr) | 260/2 |
| Recommended backing vacuum pump | (L/min) | ≧80 |
| Position | Any orientation | |
| Weight | VG・ISO-R/CF(kg) | 6/9 |
| Controller | TC353 | |
- *1: When using a backing vacuum pump of 160L/min.
- [Ambient temperature for use]
- The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.
- [Corresponding gases]
- Some service gases can deteriorate the lubrication grease and internal parts. Contact Osaka Vacuum for a list of applicable gas types.
Dimensions
| A | B | C | D |
| VG100 | φ185 | 15 | 230 |
| CF100 | φ152 | 21 | 230 |
| ISO-R100 | φ130 | 12 | 214 |
- Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
Reprinting prohibited without permission. Contents are subject to change without notice.
