Osaka Vacuum
Osaka TGkine3300M-R / 3400M-R Turbo Molecular Pumps
Manufacturer: Osaka Vacuum, Ltd.
Model: TGkine3300M-R / 3400M-R
Features
- Energy-saving design
- A memory function in pump body is equpped to store operation data, setting parameter, abnormal history, and so on.
- ※All the data can be transferred even if the controller is replaced during an overhaul.
- Various communication interfaces EtherCAT compatible
- International standard CE/NRTL/SEMI-S2 certified
Specifications
| Model*1 | TGkine3300M-R | TGkine3400M-R |
|---|---|---|
| TGkine3304M-R TGkine3305M-R | TGkine3404M-R TGkine3405M-R | |
| Inlet flange | ISO-B320 VG300 | VG350 |
| Outlet flange*2 | KF40 / KF50 | KF40 / KF50 |
| Volume flow rate | ||
| N₂ (L/s) | 3300 | |
| N₂ (with protective screen; L/s) | 3100 | |
| H₂ (L/s) | 2700 | |
| Max. compression ratio | ||
| N₂ | >1×108 | |
| H₂ | 3×103 | |
| Max. throughput*3 *4 | ||
| N₂ (sccm) | 2600 | |
| Ar (sccm) | 1900 | |
| Base pressure*5 | ||
| (Pa) | <2×10-7 | |
| (Torr) | <1.5×10-9 | |
| Startup time (min) | ≤11 | |
| Shutdown time (min) | ≤13 | |
| Max. backing pressure*6 | ||
| (Pa) | 170 | |
| (Torr) | 1.28 | |
| Recommended backing pump (L/min) | ≥2000 | |
| Mounting orientation | Any | |
| Weight (kg) | 65 / 64 | 67 |
- *1 Please contact us for the specific model name.
*2 Specifications may vary depending upon the model.
*3 1 Pa·L/s (25 °C) = 0.543 sccm (0 °C, 1 atm).
*4 When the pump is backed by a 5000 L/min backing pump.
*5 Pressure attained after 48 hours of bake-out.
*6 Maximum foreline pressure at which the pump can continue to run without triggering the fail-safe acceleration-shutdown feature.
