Manufacturer: Sakaguchi Electric Heaters CO., LTD.

Features

• Cleanliness is class 100 and products manufactured with
  ultra-high purity are ideal for the semiconductor industry, for example, where a clean environment requires.
• Strong acid resistant structure It do not erode by fluoric acid solutions and strong acid corrosive gases used in
  the cleaning process, making it an ideal alternative to quartz and other products.
• High temperature use Can use up to 2500°C in
  inert atmospheres and 510°C in atmosphere.
• Replacement of members
  Tower boards, gauge boards, etc. are units, and even if part of the board damages, it can partially replace, so it is economical.

Specifications