Sakaguchi Electric Heaters CO.
Sakaguchi POCO SUPER SiC Dummy Wafer
Manufacturer: Sakaguchi Electric Heaters CO., LTD.
Features
Specifications
| Density (g/cm3) | Coefficient of Thermal Expansion (X10-6/°C) | Thermal conductivity (W/M-degK) | Flexural Strength (Mpa) | Young’s modulus (MPA) | Slotted Surface Finish (Raμm) |
|---|---|---|---|---|---|
| 2.56 | 4.9 | 44.1 | 120 | 2×105 | 0.41 |
| Wafer diameter | 4″(100mm) | 5″(125mm) | 6″(150mm) | 8″(200mm) | 12″(300mm) |
|---|---|---|---|---|---|
| Wafer thickness | 0.533mm 0.633mm | 0.635mm | 0.635mm 0.637mm | 0.724mm | 0.775mm |
| Surface Coating | (1) No SiC coat (2) SiC coat | ||||
| Olihula | (1) Without Orifra (2) With Orifra | ||||
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