SHINKO SEIKI CO.
Shinko Seiki SERIO ICP Plasma Etching Unit
Manufacturer: Shinko Seiki Co., Ltd.
Model: SERIO
Features
- SERIO is a high-density plasma etching unit that renders smoothly etched surfaces by using a high-density ICP plasma source.
- It features excellent etching angle controllability that lends itself well to fabricating nano-imprint molds.
