Manufacturer: Sinfonia Technology co., LTD, Ltd.
Model: 300mm N2 EFEM

Features

1. Ultra-Low Oxygen Concentration Control
The N2 gas circulation system maintains oxygen concentrations below 100 ppm while minimizing N2 consumption to 100 L/min.
2. Precise Automatic Differential Pressure Control
The automatic control system maintains a precise gauge differential pressure of 10 ± 3.5 Pa.
3. Same Footprint as Conventional EFEM Systems
A stationary robot supports access to up to four Load Ports without increasing the N2 EFEM’s depth.
Additionally, the system maintains conventional side maintenance access while allowing operators to install optional equipment in this area.
The flexible design also accommodates various customer load-lock (L/L) positions
4. Internal EFEM Environment Monitoring and Analysis
Digital analyzers monitor oxygen concentration, dew point, temperature, and differential pressure.
Additionally, the system provides real-time environmental data for continuous monitoring and analysis.
5. Safe Operation
The system safely replaces N2 gas with air to support safe operation and maintenance.
SEMI S2, SEMI S8, and CE compliance are currently in progress