Manufacturer: Sinfonia Technology co., LTD, Ltd.
Model: Tape Frame Wafer EFEM

Features

1. High Reliability and Proven Experience
Our 300 mm wafer EFEM systems operate reliably in front-end semiconductor processes worldwide.
2. SEMI Standards Compliance
Our EFEM systems comply with SEMI standards.
3. Compatibility with Various Tape Frame FOUPs
Our EFEM systems support various types of Tape Frame FOUPs.
Please contact us for more details.
4. Particle-Free Operation
Our EFEM systems minimize particle contamination to ensure clean wafer handling.

Option

Wafer invert function
Area sensor
E84 interface
Ionizer
N₂ purge function for load port