Japan, Tokyo Keiso
Tokyo Keiso UCF006 Compact Ultrasonic Flow Monitor
Made in Japan
Manufacturer: Tokyo Keiso
Model: UCF006
The compact ultrasonic flow monitor UCF006 has reduced significantly the adverse effects caused by the bubbles contained in semiconductor processes by making the measuring tube straight with a negligible small pressure loss.
The improved time resolution and high speed signal processing have made the measurement stable in the low flow domain compared with the conventional flowmeters.
Thus, it is ideal for the semiconductor manufacturing which requires ultimate cleanliness.
Features
-
Enhanced resistance to bubbles
The bubbles contained in the liquid disturb the propagation of ultrasonic waves and cause an unstable measurement.
By making the measuring tube straight the stable measurement has been realized. -
Low pressure loss
The straight measuring tube has a negligible small pressure loss. It keeps a line pressure.
-
Saving space
A combined construction of a detector and a converter saves installation space.
-
Complying with
Cleared EMC test: EN61326-1: 2013
RoHS
Specifications
| Measuring fluid | Water |
|---|---|
| Flow range | 0 to 8000 mL/min |
| Fluid temperature | 10 to 80°C (0 to 50°C Ambient temperature) |
| Process connection | 3/8″ PFA tube end (Outside diameter Φ 9.53, Inside diameter Φ 6.35) |
| Accuracy | ±2% of reading at flow rate 1700 mL/min or more ±34 mL/min at flow rate less than 1700 mL/min When measuring 20°C water |
| Cable | Exclusive multi-core cable for UCF006 5 m as standard |
| Enclosure classification | IP65 equivalent, indoor use |
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