Japan, Tokyo Keiso
Tokyo Keiso UCUF-K Series Ultrasonic Flowmeter
Made in Japan
Manufacturer: Tokyo Keiso
Model: UCUF-K
The UCUF-K series ultrasonic flowmeter is designed for measuring small flow rates of ultrapure water and chemical liquids. It is comprised of the UCUF-K detector and SFC converter. All wet parts of the detector are made of special-grade PFA molds for the semiconductor industry and have no moving parts or sealing mechanism such as O-rings which would accumulate liquid components. The simple and smooth construction leaves no residues and is ideal for processes such as semiconductor manufacturing which requires ultimate cleanliness.
Features
- EMC compliance: EN61326-1:2013/EN61326-2-3:2013
- RoHS compatible
- Liquids with kinematic viscosity of as high as 40 mm2/s can be measured.
- Accuracy: Within ±1% of the reading at flow velocity of 1 m/s or more
- Wide range ability of 100 : 1 as a typical example
- Detector with highly clean construction
- Corrosion resistant and easy to install
Recommended Applications (Flow Measurement)
- Pure water and ultrapure water in the semiconductor manufacturing process
- Chemical feeding
- Highly corrosive chemicals
- Chemical mechanical polishing (CMP) slurries
- Process liquids of small and medium flow rate
- Ideal for flow measurement and control of cleaning and CMP processes
Specifications
For Detector
Size | 4mm, 6mm, 10mm, 15mm, 20mm |
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Measuring Object | Liquid (Without bubbles, and homogeneously mixed) |
Flow range | Min: 0 to 0.8 L/min(04K), Max: 18.8 to 80 L/min(20K) |
Fluid sound speed | 1000 to 2200m/s |
Fluid kinetic viscosity | 0.3 to 4.0mm2/s |
Fluid temperature | +10 to +60°C |
Fluid pressure | 0 to 0.5MPa |
Wetted parts material | New PFA |
Process connection | PFA tube end |
For Compatible Convertor
Model | SFC3000 | SFC4000 |
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Installation | DIN rail installation | Panel mounting |
Appearance |