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Chiyoda Seiki EX-M-700 “Excellent-mega” Series Ultra High Purity Gas Regulators

Made in Japan
Manufacturer: Chiyoda Seiki
Model: EX-M-700
Primary pressure: 20.0 MPa or less/adjustment pressure 0.1 to 1.0 MPa, maximum flow rate: 50 ℓ, 150 ℓ/min・Air

Feature

Super airtight structure with external leakage of 5×10-11 Pa-m3/sec. or less.
Ultra-clean finish to minimize particles.
Ultra-clean pressure gauges (Clean M) are used. (All gas contacting parts are EP (electropolished, including VCR joints) treated.)
Can be used for low-pressure main piping lines.
Stable supply of large flow rates of gases and gas mixtures.

Applications.

High purity gas supply system for ultra LSI manufacturing.
Supply systems for ultra-pure gases and mixed gases.
Various gas systems requiring ultra-cleanliness and ultra-high purity.

Thông số kỹ thuật

Max. Inlet Pressure (kgf/cm2) 3.0
Max. Delivery Pressure (kgf/cm2) 1
Normal Flow Rate (NL/min) 300
Max. Flow Rate (NL/min) 450
Flow Coefficient (CV=) 0,06max
Temperature Range (℃) -10~60°C
Dew Point (℃) -74
Helium Leak Rate (Acc/sec) ≦5×10-11
Weight (kg) 3.5

 

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