Chiyoda Seiki, Nhật Bản
Chiyoda Seiki EX-M-700 “Excellent-mega” Series Ultra High Purity Gas Regulators
Made in Japan
Manufacturer: Chiyoda Seiki
Model: EX-M-700
Primary pressure: 20.0 MPa or less/adjustment pressure 0.1 to 1.0 MPa, maximum flow rate: 50 ℓ, 150 ℓ/min・Air
Feature
Super airtight structure with external leakage of 5×10-11 Pa-m3/sec. or less.
Ultra-clean finish to minimize particles.
Ultra-clean pressure gauges (Clean M) are used. (All gas contacting parts are EP (electropolished, including VCR joints) treated.)
Can be used for low-pressure main piping lines.
Stable supply of large flow rates of gases and gas mixtures.
Applications.
High purity gas supply system for ultra LSI manufacturing.
Supply systems for ultra-pure gases and mixed gases.
Various gas systems requiring ultra-cleanliness and ultra-high purity.
Thông số kỹ thuật
| Max. Inlet Pressure (kgf/cm2) | 3.0 |
| Max. Delivery Pressure (kgf/cm2) | 1 |
| Normal Flow Rate (NL/min) | 300 |
| Max. Flow Rate (NL/min) | 450 |
| Flow Coefficient (CV=) | 0,06max |
| Temperature Range (℃) | -10~60°C |
| Dew Point (℃) | -74 |
| Helium Leak Rate (Acc/sec) | ≦5×10－11 |
| Weight (kg) | 3.5 |
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