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Chiyoda Seiki Excellent Mark II Series EX-400mkII-G1, G2 High Purity Gas Regulators For Gas Cylinder

Made in Japan
Manufacturer: Chiyoda Seiki
Model: EX-400mkII-G1, G2
Primary pressure: 20.0 MPa or less/adjustment pressure 0.1 to 1.0 MPa, maximum flow rate: 50 ℓ, 150 ℓ/min・Air

Feature

Instrument Analysis Carrier Gases Semiconductor Manufacturing Gases Poisonous & corrosive gases
Quality & Grade Ex-mkⅡ Series are consisted in three grades, such as G1,G2 and G3. Each grade product is constructed under careful consideration about the construction, materials, cleaning, assembly,performance, inspection and packing.

Thông số kỹ thuật

Max. Inlet Pressure (kgf/cm2) 220
Max. Delivery Pressure (kgf/cm2) 6
Normal Flow Rate (NL/min) 100
Max. Flow Rate (NL/min) 150
Flow Coefficient (CV=) 0,05max
Temperature Range (℃) -10~60°C
Dew Point (℃) -70
Helium Leak Rate (Acc/sec) ≦1×10-8
Weight (kg) 2.0

 

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