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Chiyoda Seiki, Nhật Bản
Chiyoda Seiki Excellent Mark II Series EX-400mkII-G1, G2 High Purity Gas Regulators For Gas Cylinder
Made in Japan
Manufacturer: Chiyoda Seiki
Model: EX-400mkII-G1, G2
Primary pressure: 20.0 MPa or less/adjustment pressure 0.1 to 1.0 MPa, maximum flow rate: 50 ℓ, 150 ℓ/min・Air
Feature
Instrument Analysis Carrier Gases Semiconductor Manufacturing Gases Poisonous & corrosive gases
Quality & Grade Ex-mkⅡ Series are consisted in three grades, such as G1,G2 and G3. Each grade product is constructed under careful consideration about the construction, materials, cleaning, assembly,performance, inspection and packing.
Thông số kỹ thuật
Max. Inlet Pressure (kgf/cm2) | 220 |
Max. Delivery Pressure (kgf/cm2) | 6 |
Normal Flow Rate (NL/min) | 100 |
Max. Flow Rate (NL/min) | 150 |
Flow Coefficient (CV=) | 0,05max |
Temperature Range (℃) | -10~60°C |
Dew Point (℃) | -70 |
Helium Leak Rate (Acc/sec) | ≦1×10-8 |
Weight (kg) | 2.0 |
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