This system offers a wide variety of output modes and functions, allowing it to operate similarly to a pressure sensor. In addition, the two-color indicator enables quick, at-a-glance confirmation of workpiece suction, improving visibility during operation. Moreover, users can configure flow rate settings, import flow rate values, and set reference flow rates directly on a computer. As a result, setup becomes easier, control becomes more precise, and overall system management becomes more efficient.
Specifications
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| Item | FS1U | |
|---|---|---|
| Power | Power supply voltage | 24 VDC ±10% |
| Sensor head supply voltage | 24 VDC ±10% (Note 1) | |
| Consumption current | 50 mA max. (not including supply power to sensor) • Display off: 15 mA MAX. (LCD backlight off) • Normal sensing: 25 mA MAX. • E-2 display: 50 mA MAX. (When sensor input overvoltage error generated) | |
| Name | Value display | 7-segment LED, 4-digit display (Display colors: green, red) |
| Display cycle | Selectable: 250 ms, 500 ms, 1000 ms | |
| Display accuracy | ±1% F.S. ±1 digit (10 L type: ±5% F.S. ±1 digit for 5 L and greater) | |
| Resolution | FS-R3 selected: 0.01 ℓ/min (ANR) [0.610 in³/min] FS-R05 selected: 1 ℓ/min (ANR) [0.061 in³/min] FS-10 selected: 0.01 ℓ/min (ANR) [0.610 in³/min] However, 0.05 ℓ/min (ANR) [0.002 ft³/min] in the case of 5 ℓ/min (ANR) [0.177 ft³/min] and greater. | |
| Operation indicator lamp | Red indicator lit when ON. | |
| Sensor input | Applicable sensor heads | FS-R3, FS-R05, FS-10 |
| Input voltage | 1.0 to 5.0 VDC | |
| Maximum input voltage | 5.3 V MAX. | |
| Sensor supply voltage | Supply from sensor controller | |
| Switch output | Output points | 4 points (NPN open collector) • Comparative output: 3 points (OUT1, OUT2, OUT3) • Error output: 1 point |
| Load voltage | 30 VDC MAX. | |
| Load current | 50 mA MAX. | |
| Repeatability | ±0.1% F.S. (relative to sensor input voltage) | |
| Internal voltage drop | 0.3 V MAX. (for load current of 5 mA) | |
| Response time | 2 ms MAX. • Selectable delay • Factory default: 2 ms | |
| Output mode | Window comparator mode 1, Window comparator mode 2 Window comparator mode 3, Window comparator mode 4 Hysteresis mode | |
| Response differential | Selectable (Can be set to two digits or more.) However, 0.05 ℓ/min (ANR) [0.002 ft³/min] MIN. when FS-10 is selected. | |
| Analog output (FS1U-S only) | Output voltage | 1 to 5 VDC (non-linearity) Output impedance: Approximately 1 kΩ (Flow rate sensor output signal is output as-is.) |
| Settings | Main unit key setting | Refer to pages 1668 to 1669. |
| External communications | Refer to pages 1669 to 1671. (RS-232C) | |
| Protective structure | Operating temperature range | -10 to 50°C [-14 to 122°F] (non-condensation, non-freezing) |
| Storage temperature range | -20 to 80°C [-4 to 176°F] (non-condensation, non-freezing) | |
| Noise resistance | EN61000-4-4 EFT/B level power supply: ±1 kV (Level 2) DATA: ±1 kV (Level 3) | |
| Dielectric strength | 500 VAC, 1 minute | |
| Insulation resistance | 100 MΩ or greater at 500 VDC megger | |
| Vibration resistance | 10 to 55 Hz, two hours in each direction (XYZ) | |
| Shock resistance | 490 m/s² [50 G] (non-repeated) | |
| General | Material | Case: PBT |
| Mass | 30 g [1.058 oz.] (Excluding cable) | |












