Manufacturer: Sinfonia Technology co., LTD, Ltd.
Model: Automated Wafer Transportation System

Features

1. 300/200 mm Wafer Mapping Function (No Modification Required)
The system supports both 300 mm and 200 mm wafer mapping without requiring modifications.
2. Energy-Saving Technology
The system automatically sets and transfers wafers between the cassette and processing equipment, reducing power consumption.
3. High Yield Through Clean N2 Atmosphere
The N2 circulation system maintains a clean nitrogen atmosphere, reducing particle contamination, moisture, and oxygen levels. Consequently, it improves wafer processing yield.
4. High Productivity with Hot Wafer Handling
The system handles hot wafers directly after processing, improving productivity and operational efficiency.

Past Operation

Automated Wafer Transportation System (EFEM)

Various EFEM Products

300mm EFEM

300mm N2 EFEM

Tape Frame Wafer EFEM

300mm Sorter