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- Chiyoda Seiki EX-20-TD Excellent For Corrosive Gas, Inner Surface Special Coating (Primary pressure: 20.0 MPa or less/adjustment pressure 0.1 to 1.0 MPa, maximum flow rate: 50 ℓ, 150 ℓ/min・Air)
Chiyoda Seiki, Japan
Chiyoda Seiki EX-20-TD Excellent For Corrosive Gas, Inner Surface Special Coating (Primary pressure: 20.0 MPa or less/adjustment pressure 0.1 to 1.0 MPa, maximum flow rate: 50 ℓ, 150 ℓ/min・Air)

Made in Japan
Manufacturer: Chiyoda Seiki
Model: EX-20-TD
Feature
Valve and diaphragm integrated type (tie diaphragm) is adopted.
Gas contacting parts are made of SUS316 with special corrosion resistant surface treatment.
Super-secret structure with He leakage (external leakage) of 1×10-9Pa-m3/sec or less.
Prevents gas leakage from external blowout in the event of diaphragm breakage.
Specifications
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