Manufacturer: KOGANEI CORPORATION

Features

This system employs a PT parallel tube diaphragm pump configuration, and it combines Koganei’s unique eight shaped cross section tube with bellows to deliver stable and precise pumping performance. As a result, the design eliminates sliding portions, so particle generation during pump operation becomes almost nonexistent. Moreover, this structure removes the need for syringe pump seal replacement and other periodic maintenance, which reduces downtime and operating costs.

In addition, the internal design minimizes liquid chemical residue, so it prevents photoresist gelling and supports cleaner processing. Furthermore, the sealed construction blocks outside air from entering the system, and this feature significantly reduces the risk of electrolyte crystallization. Therefore, the pump ensures long term stability, high cleanliness, and reliable performance in demanding chemical dispensing applications.

Specifications