Manufacturer: Nissan Tanaka
Model: S-TORR V 150

Medium flow model for primary side low pressure: S-TORRⅤ150

Features

• Engineers have developed the S-TORR regulator as a high-purity gas pressure regulator based on the TORR regulator, which has gained immense trust in semiconductor process gas lines.
• It eliminates screw structures in the gas contact section and standardizes electropolishing to achieve very high moisture displacement characteristics and particle reduction.
• Workers have connected the body and fittings by welding, and have adopted a metal seal structure for the external seal of the diaphragm section. Its high external seal integrity makes it especially safe for use with high-purity gases.
• Technicians carry out a helium leak test among other inspections for every unit before shipment.
• The STV150 series acts as a mid-flow model for primary low-pressure use, offering greater flow rates than the STV50, and it has found widespread use in low-pressure piping and similar applications.

Basic Specifications

Use materials
Gas connection part
Main body: SUS316L
Diaphragm: SUS316L
Pressure Gauge: SUS316L
Joint or fitting: SUS316L
Other gas contact parts: SUS316L, SUS316, Fluororesin
Non-contact gas part
Cap: C3604
Pressure regulating handle: ABS plastic, C3604

Performance
Inlet side maximum working pressure: 2.0MPa
Outlet side maximum working pressure: 0.6MPa
Maximum flow rate: 1500L/min(nor)（P1=1.5MPa, P2=0.6MPa, N₂ GAS）
Operating temperature: -5～40℃
Weight: 4.8kg (2 ports), 5.0kg (3 ports)
Built-in filter filtration degree: The filter has not been included, please install separately.
Surface roughness of connected gas metal parts: Ra0.25μm (optional： Ra0.1μm）
Diameter of inlet and outlet ports: 1/2″
External leak amount: 1.3×10^-11Pa・m3/sec below

Flow Characteristics Diagram

Appearance

Description

Designated Attention

※1 In the absence of a secondary side pressure gauge, the symbols for each usage pressure are as follows:

※2 For 2 ports, please select ‘X’. ‘X’ denotes a product without a pressure gauge (unprocessed port). In cases where only the fitting is without a pressure gauge, and the fitting part has been protected with a resin cap, it is ‘F’, and if it has been sealed with a metal plug, it is ‘B’.
※3 For other types of joints, other symbols have been used.
※4 For other shapes, other symbols have been used.
※5 The most suitable resin for the gas contact part (nozzle) has been selected according to the gas used.
※6 This is an example of additional specifications. For other special requirements, such as specifying face-to-face dimensions, symbols or numbers have been used. Please contact us for more details.

⚠️Warning: For correct usage, please make sure to read the ‘Instruction Manual’ carefully before use.

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