Nissan Tanaka
NISSAN TANAKA S-TORR V 2300 Pressure Regulator For Semiconductors
Manufacturer: Nissan Tanaka
Model: S-TORR V 2300
High-pressure, medium flow model for primary side high pressure
Features
- We developed the S-TORR regulator as a high-purity gas pressure regulator based on the highly reliable TORR regulator used in semiconductor process gas lines.
- It achieves very high moisture displacement characteristics and particle reduction by eliminating the threaded structure in the gas contact parts and applying standard electropolishing.
- We weld the connection between the body and fittings, and we use a metal seal structure for the external seal of the diaphragm part, ensuring high external sealing performance for safe use with highly pure gases.
- We have built a filter into the flow path of the primary chamber to reduce internal leaks.
- Before shipment, we conduct a full inspection, including He leak tests.
- The STⅤ2300 series serves as a medium flow model for primary high-pressure use and finds wide applications in primary pressure reduction facilities like cylinder cabinets.
- For corrosive gases, we offer the SH series, which utilizes a high corrosion-resistant Ni-Cr-Mo alloy. Please feel free to inquire for more details.
Basic Specifications
Use materials
Gas connection part
Main body: SUS316L
Diaphragm: SUS316L
Filter: SUS316L
Pressure Gauge: SUS316L
Joint or fitting: SUS316L
Other gas contact parts: SUS316L, SUS316, Fluororesin
Non-contact gas part
Cap: C3604
Pressure regulating handle: ABS plastic, C3604
Performance
Inlet side maximum working pressure: 15MPa
Outlet side maximum working pressure: 1.0MPa
Maximum flow rate: 400L/min(nor)(P1=10MPa, P2=1.0MPa, N₂ GAS)
Operating temperature: -5~40℃
Weight: 1.7kg (2 ports), 2.1kg (4 ports)
Built-in filter filtration degree: 20μm
Surface roughness of connected gas metal parts: Ra0.25μm (optional: Ra0.1μm)
Diameter of inlet and outlet ports: 1/4″
External leak amount: 1.3×10-11Pa・m3/sec below
Flow Characteristics Diagram
Appearance
Description
Designated Attention
※1 In the absence of a primary side pressure gauge, the symbol becomes B5.
※2 In the absence of a secondary side pressure gauge, the symbol for each operating pressure is as follows:
Operating Pressure | Symbol |
---|---|
~0.2MPa | 03 |
~0.4MPa | 06 |
~0.6MPa | 10 |
~1.0MPa | 15 |
※3 In the case of 2 ports, please select ‘X’. ‘X’ refers to a product without a pressure gauge (port unprocessed). If only fittings are used without a pressure gauge, and the fitting is protected with a resin cap, the symbol is ‘F’, and if it is sealed with a metal plug, the symbol is ‘B’.
※4 Other types of joints will use different symbols.
※5 Other shapes will use different symbols.
※6 We have selected the optimal resin for the gas contact part (nozzle) for each type of gas used.
※7 This is an example of additional specifications. For other special measures such as specifying face-to-face dimensions, symbols or numbers will be used. Please contact us for more details.
⚠️Warning: For correct usage, please make sure to read the ‘Instruction Manual’ carefully before use.
Kouei is Distributor/Agent of Nissan Tanaka
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