Manufacturer: Nissan Tanaka
Model: S-TORR V H50

Secondary High Voltage Model: S-TORRⅤH50

Features

• The S-TORR regulator is a pressure regulator designed for ultra-high purity gases, based on the highly trusted TORR regulator used in the semiconductor process gas lines.
• It eliminates the screw structure in the gas connection part and achieves very high moisture displacement characteristics and particle reduction by electrolytic polishing as standard.
• The main body and joint connections are welded, and a metal seal structure is used for the external seal of the diaphragm section. This high external sealing capability allows you to use it with confidence, especially for high-purity gases.
• We conduct shipment inspections on all units, including He leak tests.
• The STⅤH50 series can supply gas at pressures of 1.0MPa or higher on the secondary side.

Basic Specifications

Use materials
Gas connection part
Main body: SUS316L
Diaphragm: SUS316L
Pressure Gauge: SUS316L
Joint or fitting: SUS316L
Other gas contact parts: SUS316L, SUS316, Fluororesin
Non-contact gas part
Cap: C3604
Pressure regulating handle: ABS plastic, C3604

Performance
Inlet side maximum working pressure: 15MPa
Outlet side maximum working pressure: 3.0MPa
Maximum flow rate: 20L/min(nor)（P1=13MPa, P2=3.0MPa, N₂ GAS）
Operating temperature: -5～40℃
Weight: 1.5kg (2 ports), 1.9kg (4 ports)
Built-in filter filtration degree: 2μm
Surface roughness of connected gas metal parts: Ra0.25μm (optional： Ra0.1μm）
Diameter of inlet and outlet ports: 1/4″
External leak amount: 1.3×10^-11Pa・m3/sec below

Flow Characteristics Diagram

Appearance

Description

Designated Attention

※1 If there is no primary-side pressure gauge, the symbol will be “B5.”
※2 If there is no secondary-side pressure gauge, the symbols are as follows for each operating pressure:

※3 For 2 ports, please select “X.” “X” represents a product without a pressure gauge (unprocessed port). If you have a joint-only configuration without a pressure gauge and you want to protect the joint with a resin cap, choose “F.” If you prefer to seal it with a metal plug, select “B.”
※4 For other types of connectors, different symbols are used.
※5 For other shapes, different symbols are used.
※6 We select the optimal resin for the gas connection (nozzle) based on the type of gas used.
※7 This serves as an example of additional specifications. For specifying interfacial dimensions or other special requirements, please use symbols or numerical values. For more information, please contact us.

⚠️Warning: For correct usage, please make sure to read the ‘Instruction Manual’ carefully before use.

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