Manufacturer: Nissan Tanaka
Model: TORR-1300

High-pressure, standard model for primary side high pressure: TORR-1300

Features

• The TORR series has earned high trust due to its long track record and is a pressure regulator that can be considered a synonym for “pressure regulators for semiconductor gases.”
• We assemble it in a class 1000 clean room with all parts being of the 0.3μm class.
• We have integrated a filter in the primary chamber’s flow path to reduce internal leaks.
• We conduct helium leak tests and perform shipment inspections for all items.
• We also offer the option to manufacture electrolytic polishing specifications (with a surface roughness of Ra0.25μm) for gas-contacting metal parts.
• Users widely utilize the TORR-1300 series as a standard model for primary pressure reduction equipment, such as cylinder cabinets, for primary high-pressure applications.

Basic Specifications

Use materials
Gas connection part
Main body: SUS316L
Diaphragm: SUS316L
Filter: SUS316
Pressure Gauge: SUS316L (Threaded Connection)
Joint or fitting: SUS316L (Welded connection)
Other gas contact parts: SUS316L, SUS316, Fluororesin
Non-contact gas part
Cap: C3771
Pressure regulating handle: ABS plastic, C3604

Performance
Inlet side maximum working pressure: 15MPa
Outlet side maximum working pressure: 1.0MPa
Maximum flow rate: 550L/min(nor)（P1=10MPa, P2=1.0MPa, N₂ GAS）
Operating temperature: -5～40℃
Weight: 1.3kg (4 ports)
Built-in filter filtration degree: 5μm
Diameter of inlet and outlet ports: 1/4″
External leak amount: 1.3×10^-9Pa・m3/sec below (Threaded Connection) & 1.3×10^-10Pa・m3/sec below (Welded connection)

Flow Characteristics Diagram

Appearance

Description

Designated Attention

※1 The “SH” series, which uses a high corrosion-resistant alloy of Ni-Cr-Mo alloy for the metal parts in contact with gas, cannot accommodate certain requirements. The Ni-Cr-Mo alloy is equivalent to the American Haynes company’s “Hastelloy C-22.”
※2 In cases without a primary side pressure gauge, the symbol will be B5.
※3 In cases without a secondary side pressure gauge, the symbol will vary depending on the pressure used.

※ 4 Only fitting type S (Swagelok) can be selected.
※5 For other shapes, different symbols will be used.
※6 When using italic fittings, the structure will fundamentally be a welded connection. For other types of fittings, the structure will fundamentally be a threaded connection.
※7 Only fitting types S (Swagelok) and F (Finelok) can be selected.
※8If W (weld connection) is chosen for structure ②, M6R and M6L cannot be selected. W2R, W2L, and BHE will be treated as special products.
※9 Even when using the “SH” series, the material of the metal parts in contact with the gas of the pressure gauge will be SUS316L. If you require a pressure gauge with Ni-Cr-Mo alloy contact gas metal parts, please contact us.

⚠️Warning: For correct usage, please make sure to read the ‘Instruction Manual’ carefully before use.

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